TY - GEN
T1 - Planarization with suspended polyurethane beads and a stiff counterface
T2 - International Conference on Planarization/CMP Technology, ICPT 2015
AU - Boning, Duane
AU - Fan, Wei
AU - Zhuang, Yun
AU - Sampurno, Yasa
AU - Philipossian, Ara
N1 - Publisher Copyright:
© 2015 American Vacuum Society.
PY - 2016/2/17
Y1 - 2016/2/17
N2 - An alternative to conventional CMP termed pad-in-a-bottle (PIB) polishing is reported, in which the polyurethane polishing pad is replaced by a stiff polycarbonate counterface, and polyurethane beads 10-50 μm in diameter are used in conjunction with slurry and slurry particles to achieve planarization. Blanket oxide wafer PIB experiments demonstrate effective oxide removal. Patterned wafer PIB experiments show improved dishing in STI test wafers. A new dual-material PIB model has been developed and fit to the experimental data. Exploratory simulations show that the primary source of reduced pattern dependent dishing is the use of the stiff counterface as enabled by the compliant beads.
AB - An alternative to conventional CMP termed pad-in-a-bottle (PIB) polishing is reported, in which the polyurethane polishing pad is replaced by a stiff polycarbonate counterface, and polyurethane beads 10-50 μm in diameter are used in conjunction with slurry and slurry particles to achieve planarization. Blanket oxide wafer PIB experiments demonstrate effective oxide removal. Patterned wafer PIB experiments show improved dishing in STI test wafers. A new dual-material PIB model has been developed and fit to the experimental data. Exploratory simulations show that the primary source of reduced pattern dependent dishing is the use of the stiff counterface as enabled by the compliant beads.
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M3 - Conference contribution
AN - SCOPUS:84964456684
T3 - 2015 International Conference on Planarization/CMP Technology, ICPT 2015
BT - 2015 International Conference on Planarization/CMP Technology, ICPT 2015
PB - Institute of Electrical and Electronics Engineers Inc.
Y2 - 30 September 2015 through 2 October 2015
ER -