Piezodriven scanner for cryogenic applications

Lloyd J. La Comb; C. F. Quate

doi:10.1063/1.1140049

Piezodriven scanner for cryogenic applications

Lloyd J. La Comb, C. F. Quate

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

A scanning microscope stage has been developed for use at cryogenic temperatures. The stage uses a piezoelectric driving element and circular flexure hinges to achieve a slow scan travel of greater than 10 μm and a near-resonance travel of 100 μm while immersed in liquid helium at 4.2 K. The scanner has been operated inside a pressure cell in a dilution refrigerator, where it dissipates less than 150 μW of heat at 100 mK.

Original language	English (US)
Pages (from-to)	1906-1910
Number of pages	5
Journal	Review of Scientific Instruments
Volume	59
Issue number	9
DOIs	https://doi.org/10.1063/1.1140049
State	Published - 1988
Externally published	Yes

ASJC Scopus subject areas

Instrumentation

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10.1063/1.1140049

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title = "Piezodriven scanner for cryogenic applications",

abstract = "A scanning microscope stage has been developed for use at cryogenic temperatures. The stage uses a piezoelectric driving element and circular flexure hinges to achieve a slow scan travel of greater than 10 μm and a near-resonance travel of 100 μm while immersed in liquid helium at 4.2 K. The scanner has been operated inside a pressure cell in a dilution refrigerator, where it dissipates less than 150 μW of heat at 100 mK.",

author = "{La Comb}, {Lloyd J.} and Quate, {C. F.}",

year = "1988",

doi = "10.1063/1.1140049",

language = "English (US)",

volume = "59",

pages = "1906--1910",

journal = "Review of Scientific Instruments",

issn = "0034-6748",

publisher = "American Institute of Physics",

number = "9",

}

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AU - La Comb, Lloyd J.

AU - Quate, C. F.

PY - 1988

Y1 - 1988

N2 - A scanning microscope stage has been developed for use at cryogenic temperatures. The stage uses a piezoelectric driving element and circular flexure hinges to achieve a slow scan travel of greater than 10 μm and a near-resonance travel of 100 μm while immersed in liquid helium at 4.2 K. The scanner has been operated inside a pressure cell in a dilution refrigerator, where it dissipates less than 150 μW of heat at 100 mK.

AB - A scanning microscope stage has been developed for use at cryogenic temperatures. The stage uses a piezoelectric driving element and circular flexure hinges to achieve a slow scan travel of greater than 10 μm and a near-resonance travel of 100 μm while immersed in liquid helium at 4.2 K. The scanner has been operated inside a pressure cell in a dilution refrigerator, where it dissipates less than 150 μW of heat at 100 mK.

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DO - 10.1063/1.1140049

M3 - Article

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JF - Review of Scientific Instruments

IS - 9

ER -

Piezodriven scanner for cryogenic applications

Abstract

ASJC Scopus subject areas

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