Phase-shifting interferometer/ellipsometer capable of measuring the complex index of refraction and the surface profile of a test surface

Eric W. Rogala, Harrison H Barrett

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'Phase-shifting interferometer/ellipsometer capable of measuring the complex index of refraction and the surface profile of a test surface'. Together they form a unique fingerprint.

Keyphrases

Engineering