Performing mean residence time analysis of CMP processes

Ara Philipossian; Erin Mitchell

Performing mean residence time analysis of CMP processes

Ara Philipossian
, Erin Mitchell

Research output: Contribution to journal › Article › peer-review

33 Scopus citations

Abstract

There is no abstract available for the item entitled Performing mean residence time analysis of CMP processes.

Original language	English (US)
Pages (from-to)	85-95
Number of pages	11
Journal	MICRO
Volume	20
Issue number	7
State	Published - 2002
Externally published	Yes

ASJC Scopus subject areas

Engineering (miscellaneous)

Cite this

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title = "Performing mean residence time analysis of CMP processes",

abstract = "There is no abstract available for the item entitled Performing mean residence time analysis of CMP processes.",

author = "Ara Philipossian and Erin Mitchell",

year = "2002",

language = "English (US)",

volume = "20",

pages = "85--95",

journal = "MICRO",

issn = "1081-0595",

publisher = "Multidisciplinary Digital Publishing Institute (MDPI)",

number = "7",

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T1 - Performing mean residence time analysis of CMP processes

AU - Philipossian, Ara

AU - Mitchell, Erin

PY - 2002

Y1 - 2002

N2 - There is no abstract available for the item entitled Performing mean residence time analysis of CMP processes.

AB - There is no abstract available for the item entitled Performing mean residence time analysis of CMP processes.

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M3 - Article

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SN - 1081-0595

VL - 20

SP - 85

EP - 95

JO - MICRO

JF - MICRO

IS - 7

ER -

Performing mean residence time analysis of CMP processes

Abstract

ASJC Scopus subject areas

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