@article{171eb846b09f4514a36edef8bde90d04,
title = "Patterning of sub-50 nm perpendicular CoFeB/MgO-based magnetic tunnel junctions",
abstract = "Perpendicular magnetic tunnel junctions (p-MTJs) were patterned into nanopillars using electron-beam lithography to study their scaling and switching behaviour. Magnetoresistance measurements of annealed and unannealed p-MTJ films using scanning probe microscopy showed good agreement with Monte Carlo modeling. p-MTJ pillars demonstrated clear parallel magnetic states, both 'up' or both 'down' following AC-demagnetization. Significant variability in the resistance of p-MTJ pillars was observed and attributed to edge features generated during patterning or local inhomogeneity in the MgO layer.",
keywords = "magnetoresistance, metal nanopillars, nanofabrication, perpendicular magnetic tunnel junctions, spintronics",
author = "Larysa Tryputen and Tu, {Kun Hua} and Piotrowski, {Stephan K.} and Mukund Bapna and Majetich, {Sara A.} and Congli Sun and Voyles, {Paul M.} and Hamid Almasi and Weigang Wang and Patricio Vargas and Tresback, {Jason S.} and Ross, {Caroline A.}",
note = "Funding Information: This work was supported by C-SPIN, one of six STARnet Centers of SRC supported by MARCO and DARPA. This work made use of the MRSEC Shared Experimental Facilities at MIT, supported by the National Science Foundation under award number DMR-1419807; in part at the Center for Nanoscale Systems (CNS) at Harvard University, a member of the National Nanotechnology Infrastructure Network (NNIN), which is supported by the National Science Foundation under NSF award no. ECS-0335765. LT is grateful to Richard G Hobbs for valuable discussions. PV acknowledges support from Conicyt, Chile, award no. FBO07, (CEDENNA). Publisher Copyright: {\textcopyright} 2016 IOP Publishing Ltd.",
year = "2016",
month = mar,
day = "23",
doi = "10.1088/0957-4484/27/18/185302",
language = "English (US)",
volume = "27",
journal = "Nanotechnology",
issn = "0957-4484",
publisher = "IOP Publishing Ltd.",
number = "18",
}