Passive and active sol-gel integrated optics for heterogeneous integration

Research output: Contribution to journalConference articlepeer-review


The advantage of hybrid organic-inorganic sol-gel as a simple, low-cost method for the fabrication of optoelectronic integration is described. High performance integrated optics using multi-layer photo-patternable hybrid sol-gel on high-index InP compound semiconductor is achieved. An MMI based 1 × 12 beam splitter with low polarization sensitivity and high uniformity is demonstrated. The development of EO and NLO active sol-gels are described and the fabrication of active waveguides are presented. The chromophore doped active sol-gels demonstrate high stability which makes them attractive material for integrated optoelectronics. The results show the great potential of the hybrid sol-gel for heterogeneous integration with semiconductor lasers and optoelectronic components.

Original languageEnglish (US)
Article number25
Pages (from-to)164-172
Number of pages9
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 2004
EventIntegrated Optics and Photonic Integrated Circuits - Strasbourg, France
Duration: Apr 27 2004Apr 29 2004

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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