Abstract
The advantage of hybrid organic-inorganic sol-gel as a simple, low-cost method for the fabrication of optoelectronic integration is described. High performance integrated optics using multi-layer photo-patternable hybrid sol-gel on high-index InP compound semiconductor is achieved. An MMI based 1 × 12 beam splitter with low polarization sensitivity and high uniformity is demonstrated. The development of EO and NLO active sol-gels are described and the fabrication of active waveguides are presented. The chromophore doped active sol-gels demonstrate high stability which makes them attractive material for integrated optoelectronics. The results show the great potential of the hybrid sol-gel for heterogeneous integration with semiconductor lasers and optoelectronic components.
| Original language | English (US) |
|---|---|
| Article number | 25 |
| Pages (from-to) | 164-172 |
| Number of pages | 9 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 5451 |
| DOIs | |
| State | Published - 2004 |
| Event | Integrated Optics and Photonic Integrated Circuits - Strasbourg, France Duration: Apr 27 2004 → Apr 29 2004 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering