Parametric tool influence function size optimization

Weslin C. Pullen, Tianyi Wang, Heejoo Choi, Xiaolong Ke, Lei Huang, Mourad Idir, Dae Wook Kim

Research output: Contribution to journalConference articlepeer-review


To further increase the efficiency of deterministic optical fabrication, a parametric Tool Influence Function optimization method was developed to assist in the optimal tool size selection process based on any given surface error map.

Original languageEnglish (US)
Article numberJTu3B.2
JournalOptics InfoBase Conference Papers
StatePublished - 2021
EventFreeform Optics, Freeform 2021 - Part of OSA Optical Design and Fabrication 2021 - Virtual, Online, United States
Duration: Jun 27 2021Jul 1 2021

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials


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