Parametric tool influence function size optimization

Weslin C. Pullen, Tianyi Wang, Heejoo Choi, Xiaolong Ke, Lei Huang, Mourad Idir, Dae Wook Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

To further increase the efficiency of deterministic optical fabrication, a parametric Tool Influence Function optimization method was developed to assist in the optimal tool size selection process based on any given surface error map.

Original languageEnglish (US)
Title of host publicationFreeform Optics, Freeform 2021
PublisherThe Optical Society
ISBN (Electronic)9781557528209
StatePublished - 2021
Externally publishedYes
EventFreeform Optics, Freeform 2021 - Part of OSA Optical Design and Fabrication 2021 - Virtual, Online, United States
Duration: Jun 27 2021Jul 1 2021

Publication series

NameOptics InfoBase Conference Papers

Conference

ConferenceFreeform Optics, Freeform 2021 - Part of OSA Optical Design and Fabrication 2021
Country/TerritoryUnited States
CityVirtual, Online
Period6/27/217/1/21

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials

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