Parametric modeling of edge effects for polishing tool influence functions

Dae Wook Kim, Won Hyun Park, Sug Whan Kim, James H Burge

Research output: Contribution to journal › Article › peer-review

78 Scopus citations

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Parametric modeling of edge effects for polishing tool influence functions
Kim, D. W. (Creator), Park, W. H. (Creator), Kim, S.-W. (Creator) & Burge, J. H. (Creator), figshare, 2009
DOI: 10.6084/m9.figshare.c.3762296.v1, https://figshare.com/collections/Parametric_modeling_of_edge_effects_for_polishing_tool_influence_functions/3762296/1
Dataset
Parametric modeling of edge effects for polishing tool influence functions
Kim, D. W. (Creator), Park, W. H. (Creator), Kim, S.-W. (Creator) & Burge, J. H. (Creator), figshare, 2009
DOI: 10.6084/m9.figshare.c.3762296, https://figshare.com/collections/Parametric_modeling_of_edge_effects_for_polishing_tool_influence_functions/3762296
Dataset