@inproceedings{54ba6906d3014f5aa93bf33b0f7c5997,
title = "Parametric model for mirror deflection with axial support",
abstract = "In this study, we verified the effectiveness of the parametric model to estimate the surface RMS due to the mirror deflection. The parametric model based on the 4 empirical equations was derived from the FEA simulations. We can effectively estimate the surface RMS ('total' and 'after power removed') within 8\% accuracy using the parametric model.",
author = "Park, \{Won Hyun\} and Kim, \{Dae Wook\} and Burge, \{James H.\} and Kim, \{Sug Whan\}",
year = "2008",
doi = "10.1364/oft.2008.owd7",
language = "English (US)",
isbn = "9781557528612",
series = "Optics InfoBase Conference Papers",
publisher = "Optical Society of America (OSA)",
booktitle = "Optical Fabrication and Testing, OFT 2008",
note = "Optical Fabrication and Testing, OFT 2008 ; Conference date: 21-10-2008 Through 24-10-2008",
}