Abstract
Standard mid-spatial frequency tooling mark errors were parameterized into a series of characteristic features and systematically investigated. Diffraction encircled and ensquared energy radii at the 90% levels from an unpowered optical surface were determined as a function of the root-mean-square surface irregularity, characteristic tooling mark parameters, fold mirror rotation angle, and incident beam f-number. Tooling mark frequencies on the order of 20 cycles per aperture or less were considered. This subset encompasses small footprints on single-point diamond turned optics or large footprints on sub-aperture tool polished optics. Of the characteristic features, off-axis fabrication distance held the highest impact to encircled and ensquared energy radii. The transverse oscillation of a tooling path was found to be the second highest contributor. Both impacts increased with radial tooling mark frequency.
Original language | English (US) |
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Article number | 584 |
Journal | Photonics |
Volume | 8 |
Issue number | 12 |
DOIs | |
State | Published - Dec 2021 |
Keywords
- Encircled energy
- Fabrication
- Metrology
- Periodic structure
- Tooling marks
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics
- Instrumentation
- Radiology Nuclear Medicine and imaging