Parallel lithographic fabrication of micro-optical lenslets by photoexpansion in chalcogenide glasses

S. Ramachandran; D. J. Brady; S. G. Bishop

Parallel lithographic fabrication of micro-optical lenslets by photoexpansion in chalcogenide glasses

S. Ramachandran, D. J. Brady, S. G. Bishop

Research output: Contribution to journal › Conference article › peer-review

Abstract

The non-locality of the photoexpansion effect as well as large volume changes observed in the fabrication of micro-lenses on the surface of As₂S₃ (chalcogenide) glass was investigated experimentally. The parallel photolithographic process was used in micro-lens and lens array fabrication because of its distinct advantages over focused light techniques. The process allowed excellent control on feature size. The non-local expansion gave smooth rounded edges and a sufficiently small exposure resulted in a convex structure. Smaller lenslets seemed to preserve their convex structure and showed higher aspect ratios.

Original language	English (US)
Pages (from-to)	284-285
Number of pages	2
Journal	Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
Volume	1
State	Published - 1996
Externally published	Yes
Event	Proceedings of the 1996 9th Annual Meeting of IEEE Lasers and Electro-Optics Society, LEOS'96. Part 1 (of 2) - Boston, MA, USA Duration: Nov 18 1996 → Nov 19 1996

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

Cite this

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title = "Parallel lithographic fabrication of micro-optical lenslets by photoexpansion in chalcogenide glasses",

abstract = "The non-locality of the photoexpansion effect as well as large volume changes observed in the fabrication of micro-lenses on the surface of As2S3 (chalcogenide) glass was investigated experimentally. The parallel photolithographic process was used in micro-lens and lens array fabrication because of its distinct advantages over focused light techniques. The process allowed excellent control on feature size. The non-local expansion gave smooth rounded edges and a sufficiently small exposure resulted in a convex structure. Smaller lenslets seemed to preserve their convex structure and showed higher aspect ratios.",

author = "S. Ramachandran and Brady, {D. J.} and Bishop, {S. G.}",

year = "1996",

language = "English (US)",

volume = "1",

pages = "284--285",

journal = "Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS",

issn = "1092-8081",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

note = "Proceedings of the 1996 9th Annual Meeting of IEEE Lasers and Electro-Optics Society, LEOS'96. Part 1 (of 2) ; Conference date: 18-11-1996 Through 19-11-1996",

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AU - Ramachandran, S.

AU - Brady, D. J.

AU - Bishop, S. G.

PY - 1996

Y1 - 1996

N2 - The non-locality of the photoexpansion effect as well as large volume changes observed in the fabrication of micro-lenses on the surface of As2S3 (chalcogenide) glass was investigated experimentally. The parallel photolithographic process was used in micro-lens and lens array fabrication because of its distinct advantages over focused light techniques. The process allowed excellent control on feature size. The non-local expansion gave smooth rounded edges and a sufficiently small exposure resulted in a convex structure. Smaller lenslets seemed to preserve their convex structure and showed higher aspect ratios.

AB - The non-locality of the photoexpansion effect as well as large volume changes observed in the fabrication of micro-lenses on the surface of As2S3 (chalcogenide) glass was investigated experimentally. The parallel photolithographic process was used in micro-lens and lens array fabrication because of its distinct advantages over focused light techniques. The process allowed excellent control on feature size. The non-local expansion gave smooth rounded edges and a sufficiently small exposure resulted in a convex structure. Smaller lenslets seemed to preserve their convex structure and showed higher aspect ratios.

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M3 - Conference article

AN - SCOPUS:0030418084

SN - 1092-8081

VL - 1

SP - 284

EP - 285

JO - Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

JF - Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

T2 - Proceedings of the 1996 9th Annual Meeting of IEEE Lasers and Electro-Optics Society, LEOS'96. Part 1 (of 2)

Y2 - 18 November 1996 through 19 November 1996

ER -

Parallel lithographic fabrication of micro-optical lenslets by photoexpansion in chalcogenide glasses

Abstract

ASJC Scopus subject areas

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