Abstract
Microfluidic systems typically involve more than one microchannel. The simplest multiple microchannel systems can be classified into series or parallel flows. In this work, gas flow in complex microsystems of multiple channels, connected in parallel and in series, has been experimentally investigated and theoretically analysed for the first time. A set of microchannels connected in parallel and series have been successfully fabricated using standard micromachining techniques. Mass flow rate and pressure distribution measurements have been conducted using Argon gas and compared with calculations based on a simple two-dimensional model, taken into account both compressibility and slip flow effects. Pressure distributions along the microchannel systems have shown good agreement with the theoretical calculations.
Original language | English (US) |
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Pages | 291-294 |
Number of pages | 4 |
State | Published - 2003 |
Externally published | Yes |
Event | IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems - Kyoto, Japan Duration: Jan 19 2003 → Jan 23 2003 |
Other
Other | IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems |
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Country/Territory | Japan |
City | Kyoto |
Period | 1/19/03 → 1/23/03 |
ASJC Scopus subject areas
- Control and Systems Engineering
- Mechanical Engineering
- Electrical and Electronic Engineering