Abstract
A new composition of organic-inorganic photosensitive materials is grown using the sol-gel process. The material, organoaluminosilicate, is spin coated onto Si wafers and channel waveguides are photoinscribed and developed using solvent assisted photolithographic process. The process is simple, reproducible, low cost and low loss.
Original language | English (US) |
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Pages (from-to) | 1940-1941 |
Number of pages | 2 |
Journal | Electronics Letters |
Volume | 34 |
Issue number | 20 |
DOIs | |
State | Published - Oct 1 1998 |
ASJC Scopus subject areas
- Electrical and Electronic Engineering