Organic-inorganic materials for integrated optoelectronics

M. A. Fardad, M. Fallahi

Research output: Contribution to journalArticlepeer-review

26 Scopus citations


A new composition of organic-inorganic photosensitive materials is grown using the sol-gel process. The material, organoaluminosilicate, is spin coated onto Si wafers and channel waveguides are photoinscribed and developed using solvent assisted photolithographic process. The process is simple, reproducible, low cost and low loss.

Original languageEnglish (US)
Pages (from-to)1940-1941
Number of pages2
JournalElectronics Letters
Issue number20
StatePublished - Oct 1 1998

ASJC Scopus subject areas

  • Electrical and Electronic Engineering


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