Organic-inorganic materials for integrated optoelectronics

M. A. Fardad; M. Fallahi

doi:10.1049/el:19981360

Organic-inorganic materials for integrated optoelectronics

M. A. Fardad, M. Fallahi

Optical Sciences

Research output: Contribution to journal › Article › peer-review

26 Scopus citations

Abstract

A new composition of organic-inorganic photosensitive materials is grown using the sol-gel process. The material, organoaluminosilicate, is spin coated onto Si wafers and channel waveguides are photoinscribed and developed using solvent assisted photolithographic process. The process is simple, reproducible, low cost and low loss.

Original language	English (US)
Pages (from-to)	1940-1941
Number of pages	2
Journal	Electronics Letters
Volume	34
Issue number	20
DOIs	https://doi.org/10.1049/el:19981360
State	Published - Oct 1 1998

ASJC Scopus subject areas

Electrical and Electronic Engineering

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10.1049/el:19981360

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title = "Organic-inorganic materials for integrated optoelectronics",

abstract = "A new composition of organic-inorganic photosensitive materials is grown using the sol-gel process. The material, organoaluminosilicate, is spin coated onto Si wafers and channel waveguides are photoinscribed and developed using solvent assisted photolithographic process. The process is simple, reproducible, low cost and low loss.",

author = "Fardad, {M. A.} and M. Fallahi",

year = "1998",

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AB - A new composition of organic-inorganic photosensitive materials is grown using the sol-gel process. The material, organoaluminosilicate, is spin coated onto Si wafers and channel waveguides are photoinscribed and developed using solvent assisted photolithographic process. The process is simple, reproducible, low cost and low loss.

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Organic-inorganic materials for integrated optoelectronics

Abstract

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