@inproceedings{81cab721d0164c209b01b0858437f814,
title = "Optical testing with computer generated holograms: Comprehensive error analysis",
abstract = "Interferometry with computer generated holograms (CGHs) has become the industry standard for accurate measurements of aspheric optical surfaces. The CGH is a diffractive optical element that can be designed to create virtually any phase or amplitude distribution, and can be accurately manufactured using methods and equipment developed for integrated circuit production. Surface measurements with nanometer level precision can be performed using accurately wellcalibrated equipment. This paper provides a systematic analysis of all significant sources of error for CGH metrology, including encoding error, pattern distortion, substrate irregularity and calibration, and system alignment.",
keywords = "Aspheric metrology, Computer Generated Hologram, Freeform aspherics, Optical testing",
author = "Chunyu Zhao and Burge, {James H.}",
year = "2013",
doi = "10.1117/12.2024742",
language = "English (US)",
isbn = "9780819496881",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Optical Manufacturing and Testing X",
note = "Optical Manufacturing and Testing X ; Conference date: 26-08-2013 Through 27-08-2013",
}