Optical testing for meter size aspheric optics

Peng Su; Chang Jin Oh; Chunyu Zhao; James H. Burge

doi:10.1117/12.930513

Optical testing for meter size aspheric optics

Peng Su, Chang Jin Oh, Chunyu Zhao, James H. Burge

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

5 Scopus citations

Abstract

Several meter size steep aspheric optics, with aspheric departure ranging from 100μm to 2mm, have been successfully fabricated at the College of Optical Sciences at University of Arizona. Optical metrology systems have been developed for measuring the optical surfaces efficiently and accurately. These systems include laser tracker surface profiler, swing arm optical CMM with different type of sensors, slope measurements with SCOTS, the Software Configurable Optical Test System (SCOTS) and interferometry with computer generated holograms. We summarize the test methods and provide comparison of the relative strengths and weaknesses.

Original language	English (US)
Title of host publication	Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI
DOIs	https://doi.org/10.1117/12.930513
State	Published - 2012
Event	Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI - San Diego, CA, United States Duration: Aug 13 2012 → Aug 14 2012

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	8466
ISSN (Print)	0277-786X

Other

Other	Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI
Country/Territory	United States
City	San Diego, CA
Period	8/13/12 → 8/14/12

Keywords

Aspherics
Deflectometry
Fringe reflection
Interferometry
Optical metrology
Optical testing

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.930513

Cite this

Optical testing for meter size aspheric optics. / Su, Peng; Oh, Chang Jin; Zhao, Chunyu et al.
Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI. 2012. 84660S (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8466).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Su, P, Oh, CJ, Zhao, C & Burge, JH 2012, Optical testing for meter size aspheric optics. in Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI., 84660S, Proceedings of SPIE - The International Society for Optical Engineering, vol. 8466, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI, San Diego, CA, United States, 8/13/12. https://doi.org/10.1117/12.930513

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title = "Optical testing for meter size aspheric optics",

abstract = "Several meter size steep aspheric optics, with aspheric departure ranging from 100μm to 2mm, have been successfully fabricated at the College of Optical Sciences at University of Arizona. Optical metrology systems have been developed for measuring the optical surfaces efficiently and accurately. These systems include laser tracker surface profiler, swing arm optical CMM with different type of sensors, slope measurements with SCOTS, the Software Configurable Optical Test System (SCOTS) and interferometry with computer generated holograms. We summarize the test methods and provide comparison of the relative strengths and weaknesses.",

keywords = "Aspherics, Deflectometry, Fringe reflection, Interferometry, Optical metrology, Optical testing",

author = "Peng Su and Oh, \{Chang Jin\} and Chunyu Zhao and Burge, \{James H.\}",

year = "2012",

doi = "10.1117/12.930513",

language = "English (US)",

isbn = "9780819491831",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

booktitle = "Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI",

note = "Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI ; Conference date: 13-08-2012 Through 14-08-2012",

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TY - GEN

T1 - Optical testing for meter size aspheric optics

AU - Su, Peng

AU - Oh, Chang Jin

AU - Zhao, Chunyu

AU - Burge, James H.

PY - 2012

Y1 - 2012

N2 - Several meter size steep aspheric optics, with aspheric departure ranging from 100μm to 2mm, have been successfully fabricated at the College of Optical Sciences at University of Arizona. Optical metrology systems have been developed for measuring the optical surfaces efficiently and accurately. These systems include laser tracker surface profiler, swing arm optical CMM with different type of sensors, slope measurements with SCOTS, the Software Configurable Optical Test System (SCOTS) and interferometry with computer generated holograms. We summarize the test methods and provide comparison of the relative strengths and weaknesses.

AB - Several meter size steep aspheric optics, with aspheric departure ranging from 100μm to 2mm, have been successfully fabricated at the College of Optical Sciences at University of Arizona. Optical metrology systems have been developed for measuring the optical surfaces efficiently and accurately. These systems include laser tracker surface profiler, swing arm optical CMM with different type of sensors, slope measurements with SCOTS, the Software Configurable Optical Test System (SCOTS) and interferometry with computer generated holograms. We summarize the test methods and provide comparison of the relative strengths and weaknesses.

KW - Aspherics

KW - Deflectometry

KW - Fringe reflection

KW - Interferometry

KW - Optical metrology

KW - Optical testing

UR - https://www.scopus.com/pages/publications/84872102215

UR - https://www.scopus.com/inward/citedby.url?scp=84872102215&partnerID=8YFLogxK

U2 - 10.1117/12.930513

DO - 10.1117/12.930513

M3 - Conference contribution

AN - SCOPUS:84872102215

SN - 9780819491831

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI

T2 - Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI

Y2 - 13 August 2012 through 14 August 2012

ER -

Optical testing for meter size aspheric optics

Abstract

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Keywords

ASJC Scopus subject areas

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