Optical Reference Profilometry

Stephan R. Clark, John E. Greivenkamp, Ralph M. Richard, José M. Sasián

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The design of a second-generation optical reference profilometer that addresses stability and mechanical linkage issues is presented. The goal is to improve accuracy and long-term measurement stability.

Original languageEnglish (US)
Title of host publicationOptical Fabrication and Testing, OFT 2000
PublisherOptica Publishing Group (formerly OSA)
Pages82-84
Number of pages3
ISBN (Electronic)9781557528209
StatePublished - 2000
EventOptical Fabrication and Testing, OFT 2000 - Quebec City, Canada
Duration: Jun 8 2000 → …

Publication series

NameOptics InfoBase Conference Papers

Conference

ConferenceOptical Fabrication and Testing, OFT 2000
Country/TerritoryCanada
CityQuebec City
Period6/8/00 → …

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials

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