@inproceedings{df7cb318a42f4fa68a3ef87a297ec8d2,
title = "Optical Reference Profilometry",
abstract = "The design of a second-generation optical reference profilometer that addresses stability and mechanical linkage issues is presented. The goal is to improve accuracy and long-term measurement stability.",
author = "Clark, {Stephan R.} and Greivenkamp, {John E.} and Richard, {Ralph M.} and Sasi{\'a}n, {Jos{\'e} M.}",
note = "Publisher Copyright: {\textcopyright} 2000 OSA/OFT 2000.; Optical Fabrication and Testing, OFT 2000 ; Conference date: 08-06-2000",
year = "2000",
language = "English (US)",
series = "Optics InfoBase Conference Papers",
publisher = "Optica Publishing Group (formerly OSA)",
pages = "82--84",
booktitle = "Optical Fabrication and Testing, OFT 2000",
}