Optical Reference Profilometry

Stephan R. Clark, John E. Greivenkamp, Ralph M. Richard, José M. Sasián

Research output: Chapter in Book/Report/Conference proceedingConference contribution


The design of a second-generation optical reference profilometer that addresses stability and mechanical linkage issues is presented. The goal is to improve accuracy and long-term measurement stability.

Original languageEnglish (US)
Title of host publicationOptical Fabrication and Testing, OFT 2000
PublisherOptica Publishing Group (formerly OSA)
Number of pages3
ISBN (Electronic)1557526370
StatePublished - 2000
EventOptical Fabrication and Testing, OFT 2000 - Quebec City, Canada
Duration: Jun 8 2000 → …

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701


ConferenceOptical Fabrication and Testing, OFT 2000
CityQuebec City
Period6/8/00 → …

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials


Dive into the research topics of 'Optical Reference Profilometry'. Together they form a unique fingerprint.

Cite this