Optical properties of polyimide during ArF excimer laser ablation

D. W. Hahn; G. H. Pettit; M. N. Ediger

doi:10.1063/1.357702

Optical properties of polyimide during ArF excimer laser ablation

D. W. Hahn, G. H. Pettit, M. N. Ediger

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5 Scopus citations

Abstract

Reflectivity measurements of the backsurface of thin polyimide films indicate a transient decrease in reflectivity during ArF (193 nm) excimer laser ablation. The posterior surface reflectivity is decreased by 20%-40% over the range of incident laser fluences from 75 to 175 mJ/cm², respectively. The results are discussed within the framework of a theoretical model of saturable absorption, and calculations are presented which are in good agreement with the experimental results. It is concluded that the observed decrease in reflectivity is the result of transient changes in the optical properties within the solid polymer material which occur during ultraviolet laser ablation.

Original language	English (US)
Pages (from-to)	1830-1832
Number of pages	3
Journal	Journal of Applied Physics
Volume	76
Issue number	3
DOIs	https://doi.org/10.1063/1.357702
State	Published - 1994
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy(all)

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10.1063/1.357702

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title = "Optical properties of polyimide during ArF excimer laser ablation",

abstract = "Reflectivity measurements of the backsurface of thin polyimide films indicate a transient decrease in reflectivity during ArF (193 nm) excimer laser ablation. The posterior surface reflectivity is decreased by 20%-40% over the range of incident laser fluences from 75 to 175 mJ/cm2, respectively. The results are discussed within the framework of a theoretical model of saturable absorption, and calculations are presented which are in good agreement with the experimental results. It is concluded that the observed decrease in reflectivity is the result of transient changes in the optical properties within the solid polymer material which occur during ultraviolet laser ablation.",

author = "Hahn, {D. W.} and Pettit, {G. H.} and Ediger, {M. N.}",

year = "1994",

doi = "10.1063/1.357702",

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T1 - Optical properties of polyimide during ArF excimer laser ablation

AU - Hahn, D. W.

AU - Pettit, G. H.

AU - Ediger, M. N.

PY - 1994

Y1 - 1994

N2 - Reflectivity measurements of the backsurface of thin polyimide films indicate a transient decrease in reflectivity during ArF (193 nm) excimer laser ablation. The posterior surface reflectivity is decreased by 20%-40% over the range of incident laser fluences from 75 to 175 mJ/cm2, respectively. The results are discussed within the framework of a theoretical model of saturable absorption, and calculations are presented which are in good agreement with the experimental results. It is concluded that the observed decrease in reflectivity is the result of transient changes in the optical properties within the solid polymer material which occur during ultraviolet laser ablation.

AB - Reflectivity measurements of the backsurface of thin polyimide films indicate a transient decrease in reflectivity during ArF (193 nm) excimer laser ablation. The posterior surface reflectivity is decreased by 20%-40% over the range of incident laser fluences from 75 to 175 mJ/cm2, respectively. The results are discussed within the framework of a theoretical model of saturable absorption, and calculations are presented which are in good agreement with the experimental results. It is concluded that the observed decrease in reflectivity is the result of transient changes in the optical properties within the solid polymer material which occur during ultraviolet laser ablation.

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Optical properties of polyimide during ArF excimer laser ablation

Abstract

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