Optical properties of micromachined polysilicon reflective surfaces with etching holes

Jun Zou; Colin Byrne; Chang Liu; David Brady

doi:10.1117/12.324315

Optical properties of micromachined polysilicon reflective surfaces with etching holes

Jun Zou, Colin Byrne, Chang Liu, David Brady

Research output: Contribution to journal › Conference article › peer-review

5 Scopus citations

Abstract

MUMPS (Multi-User MEMS Process) is receiving increasingly wide use in micro optics. We have investigated the optical properties of the polysilicon reflective surface in a typical MUMPS chip within the visible light spectrum. The effect of etching holes on the reflected laser beam is studied. The reflectivity and diffraction patterns at five different wavelengths have been measured. The optical properties of the polysilicon reflective surface are greatly affected by the surface roughness, the etching holes, as well as the material. The etching holes contribute to diffraction and reduction of reflectivity. This study provides a basis for optimal design of micromachined free-space optical systems.

Original language	English (US)
Pages (from-to)	307-314
Number of pages	8
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	3511
DOIs	https://doi.org/10.1117/12.324315
State	Published - 1998
Externally published	Yes
Event	Micromachining and Microfabrication Process Technology IV - Santa Clara, CA, United States Duration: Sep 21 1998 → Sep 22 1998

Keywords

Diffraction
MUMPS
Optical properties
Reflectivity

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.324315

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title = "Optical properties of micromachined polysilicon reflective surfaces with etching holes",

abstract = "MUMPS (Multi-User MEMS Process) is receiving increasingly wide use in micro optics. We have investigated the optical properties of the polysilicon reflective surface in a typical MUMPS chip within the visible light spectrum. The effect of etching holes on the reflected laser beam is studied. The reflectivity and diffraction patterns at five different wavelengths have been measured. The optical properties of the polysilicon reflective surface are greatly affected by the surface roughness, the etching holes, as well as the material. The etching holes contribute to diffraction and reduction of reflectivity. This study provides a basis for optimal design of micromachined free-space optical systems.",

keywords = "Diffraction, MUMPS, Optical properties, Reflectivity",

author = "Jun Zou and Colin Byrne and Chang Liu and David Brady",

year = "1998",

doi = "10.1117/12.324315",

language = "English (US)",

volume = "3511",

pages = "307--314",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

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publisher = "SPIE",

note = "Micromachining and Microfabrication Process Technology IV ; Conference date: 21-09-1998 Through 22-09-1998",

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TY - JOUR

T1 - Optical properties of micromachined polysilicon reflective surfaces with etching holes

AU - Zou, Jun

AU - Byrne, Colin

AU - Liu, Chang

AU - Brady, David

PY - 1998

Y1 - 1998

N2 - MUMPS (Multi-User MEMS Process) is receiving increasingly wide use in micro optics. We have investigated the optical properties of the polysilicon reflective surface in a typical MUMPS chip within the visible light spectrum. The effect of etching holes on the reflected laser beam is studied. The reflectivity and diffraction patterns at five different wavelengths have been measured. The optical properties of the polysilicon reflective surface are greatly affected by the surface roughness, the etching holes, as well as the material. The etching holes contribute to diffraction and reduction of reflectivity. This study provides a basis for optimal design of micromachined free-space optical systems.

AB - MUMPS (Multi-User MEMS Process) is receiving increasingly wide use in micro optics. We have investigated the optical properties of the polysilicon reflective surface in a typical MUMPS chip within the visible light spectrum. The effect of etching holes on the reflected laser beam is studied. The reflectivity and diffraction patterns at five different wavelengths have been measured. The optical properties of the polysilicon reflective surface are greatly affected by the surface roughness, the etching holes, as well as the material. The etching holes contribute to diffraction and reduction of reflectivity. This study provides a basis for optimal design of micromachined free-space optical systems.

KW - Diffraction

KW - MUMPS

KW - Optical properties

KW - Reflectivity

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DO - 10.1117/12.324315

M3 - Conference article

AN - SCOPUS:0012070883

SN - 0277-786X

VL - 3511

SP - 307

EP - 314

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Micromachining and Microfabrication Process Technology IV

Y2 - 21 September 1998 through 22 September 1998

ER -

Optical properties of micromachined polysilicon reflective surfaces with etching holes

Abstract

Keywords

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