TY - GEN
T1 - Optical metrology systems spanning the full spatial frequency spectrum
AU - Kim, Dae Wook
AU - Aftab, Maham
AU - Choi, Heejoo
AU - Graves, Logan
AU - Trumper, Isaac
N1 - Publisher Copyright:
© OSA 2016.
PY - 2016
Y1 - 2016
N2 - We present a collection of unique, collaborative, optical metrology systems that are fully capable of measuring the extensive spectrum of low-to-mid-to-high spatial frequencies, corresponding to surface shape information.
AB - We present a collection of unique, collaborative, optical metrology systems that are fully capable of measuring the extensive spectrum of low-to-mid-to-high spatial frequencies, corresponding to surface shape information.
UR - http://www.scopus.com/inward/record.url?scp=85165772233&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85165772233&partnerID=8YFLogxK
U2 - 10.1364/FIO.2016.FW5G.4
DO - 10.1364/FIO.2016.FW5G.4
M3 - Conference contribution
AN - SCOPUS:85165772233
SN - 9781943580194
T3 - Optics InfoBase Conference Papers
BT - Frontiers in Optics, FiO 2016
PB - Optica Publishing Group (formerly OSA)
T2 - Frontiers in Optics, FiO 2016
Y2 - 17 October 2016 through 21 October 2016
ER -