Abstract
Phase light modulator (PLM) by MEMS mirror array operating in a piston-mode motion enables a high-speed diffractive beam steering in a random-access and flexible manner that makes a lidar system more intelligent and adaptive. Diffraction efficiency is determined by the range of the piston motion of the MEMS array; consequently, a larger range of the piston motion is required for beam steering in infrared, such as for lidar. We demonstrated how the range of the piston motion is optically enhanced by a factor of two with a light-recycling optics based on Talbot self-imaging. The proposed optical architecture extends the usable range of the wavelength so that a MEMS-PLM designed for visible wavelength is applicable for a high-efficiency beam steering at an infrared wavelength of 1550 nm with an improved diffraction efficiency of 30%.
Original language | English (US) |
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Article number | 1393 |
Journal | Micromachines |
Volume | 13 |
Issue number | 9 |
DOIs | |
State | Published - Sep 2022 |
Keywords
- LiDAR
- MEMS
- Talbot image
- beam steering
- computer-generated hologram (CGH)
- phase light modulator (PLM)
ASJC Scopus subject areas
- Control and Systems Engineering
- Mechanical Engineering
- Electrical and Electronic Engineering