@article{5d355333016c4cee908a438eac16c2a4,
title = "Optical design and system characterization of an imaging microscope at 121.6 nm",
abstract = "We present the optical design and system characterization of an imaging microscope prototype at 121.6 nm. System engineering processes are demonstrated through the construction of a Schwarzschild microscope objective, including tolerance analysis, fabrication, alignment, and testing. Further improvements on the as-built system with a correction phase plate are proposed and analyzed. Finally, the microscope assembly and the imaging properties of the prototype are demonstrated.",
keywords = "Alignment, Midspatial frequency error, Phase plate, Schwarzschild objective, Vacuum ultraviolet",
author = "Weichuan Gao and Emily Finan and Kim, {Geon Hee} and Youngsik Kim and Milster, {Thomas D.}",
note = "Funding Information: This material was based upon work supported by the National Science Foundation (NSF) under Grant No. 1306921. Funding Information: This material was based upon work supported by the National Science Foundation (NSF) under Grant No. 1306921. Any opinions, findings, and conclusions or recommendations expressed in this material are those of the authors and do not necessarily reflect the views of the NSF. Authors would like to thank Lee Johnson, Ridley Gatlin, and John Brewer for preparing the mirror coating and the imaging target sample. Authors would like to thank Dr. Barry Gelernt and Dr. Daniel Murnick of UV Solutions for insightful discussions and Synopsys for providing student licenses of CODEV. Publisher Copyright: {\textcopyright} 2018 Society of Photo-Optical Instrumentation Engineers (SPIE). {\textcopyright} 2018 SPIE.",
year = "2018",
month = mar,
day = "1",
doi = "10.1117/1.OE.57.3.035101",
language = "English (US)",
volume = "57",
journal = "SPIE J",
issn = "0091-3286",
publisher = "SPIE",
number = "3",
}