Optical design and system characterization of an imaging microscope at 121.6 nm

Weichuan Gao; Emily Finan; Geon Hee Kim; Youngsik Kim; Thomas D. Milster

doi:10.1117/1.OE.57.3.035101

Optical design and system characterization of an imaging microscope at 121.6 nm

Weichuan Gao, Emily Finan, Geon Hee Kim, Youngsik Kim, Thomas D. Milster

Research output: Contribution to journal › Article › peer-review

Abstract

We present the optical design and system characterization of an imaging microscope prototype at 121.6 nm. System engineering processes are demonstrated through the construction of a Schwarzschild microscope objective, including tolerance analysis, fabrication, alignment, and testing. Further improvements on the as-built system with a correction phase plate are proposed and analyzed. Finally, the microscope assembly and the imaging properties of the prototype are demonstrated.

Original language	English (US)
Article number	035101
Journal	Optical Engineering
Volume	57
Issue number	3
DOIs	https://doi.org/10.1117/1.OE.57.3.035101
State	Published - Mar 1 2018

Keywords

Alignment
Midspatial frequency error
Phase plate
Schwarzschild objective
Vacuum ultraviolet

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics
General Engineering

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10.1117/1.OE.57.3.035101

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title = "Optical design and system characterization of an imaging microscope at 121.6 nm",

abstract = "We present the optical design and system characterization of an imaging microscope prototype at 121.6 nm. System engineering processes are demonstrated through the construction of a Schwarzschild microscope objective, including tolerance analysis, fabrication, alignment, and testing. Further improvements on the as-built system with a correction phase plate are proposed and analyzed. Finally, the microscope assembly and the imaging properties of the prototype are demonstrated.",

keywords = "Alignment, Midspatial frequency error, Phase plate, Schwarzschild objective, Vacuum ultraviolet",

author = "Weichuan Gao and Emily Finan and Kim, {Geon Hee} and Youngsik Kim and Milster, {Thomas D.}",

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AU - Gao, Weichuan

AU - Finan, Emily

AU - Kim, Geon Hee

AU - Kim, Youngsik

AU - Milster, Thomas D.

PY - 2018/3/1

Y1 - 2018/3/1

N2 - We present the optical design and system characterization of an imaging microscope prototype at 121.6 nm. System engineering processes are demonstrated through the construction of a Schwarzschild microscope objective, including tolerance analysis, fabrication, alignment, and testing. Further improvements on the as-built system with a correction phase plate are proposed and analyzed. Finally, the microscope assembly and the imaging properties of the prototype are demonstrated.

AB - We present the optical design and system characterization of an imaging microscope prototype at 121.6 nm. System engineering processes are demonstrated through the construction of a Schwarzschild microscope objective, including tolerance analysis, fabrication, alignment, and testing. Further improvements on the as-built system with a correction phase plate are proposed and analyzed. Finally, the microscope assembly and the imaging properties of the prototype are demonstrated.

KW - Alignment

KW - Midspatial frequency error

KW - Phase plate

KW - Schwarzschild objective

KW - Vacuum ultraviolet

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Optical design and system characterization of an imaging microscope at 121.6 nm

Abstract

Keywords

ASJC Scopus subject areas

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