Optical characterization of multilayer stacks for phase-change media

Rongguang Liang; Chubing Peng; Kenichi Nagata; Kelly Daly-Flynn; Masud Mansuripur

doi:10.1117/12.453427

Optical characterization of multilayer stacks for phase-change media

Rongguang Liang, Chubing Peng, Kenichi Nagata, Kelly Daly-Flynn, Masud Mansuripur

Research output: Contribution to journal › Article › peer-review

Abstract

We report results of measurements of the optical constants of the dielectric layer (ZnS-SiO₂), reflecting layer (aluminum-chromium alloy), and phase-change layer (GeSbTe, AgInSbTe) used as the media of phase-change optical recording. The refractive index n and the absorption coefficient k of these materials vary to some extent with the film thickness and with the film deposition environment. We report the observed variations of optical constants among samples of differing structure and among samples fabricated in different laboratories

Original language	English (US)
Pages (from-to)	134-145
Number of pages	12
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4342
DOIs	https://doi.org/10.1117/12.453427
State	Published - 2002

Keywords

Ellipsometry
Measurement of optical constants
Optical data storage
Optical recording
Phase-change media
Reflectometry
Thin-film characterization

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.453427

Cite this

@article{f7e33c44d7ca40c3ae49c4f5e6d86877,

title = "Optical characterization of multilayer stacks for phase-change media",

abstract = "We report results of measurements of the optical constants of the dielectric layer (ZnS-SiO2), reflecting layer (aluminum-chromium alloy), and phase-change layer (GeSbTe, AgInSbTe) used as the media of phase-change optical recording. The refractive index n and the absorption coefficient k of these materials vary to some extent with the film thickness and with the film deposition environment. We report the observed variations of optical constants among samples of differing structure and among samples fabricated in different laboratories",

keywords = "Ellipsometry, Measurement of optical constants, Optical data storage, Optical recording, Phase-change media, Reflectometry, Thin-film characterization",

author = "Rongguang Liang and Chubing Peng and Kenichi Nagata and Kelly Daly-Flynn and Masud Mansuripur",

year = "2002",

doi = "10.1117/12.453427",

language = "English (US)",

volume = "4342",

pages = "134--145",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

}

TY - JOUR

T1 - Optical characterization of multilayer stacks for phase-change media

AU - Liang, Rongguang

AU - Peng, Chubing

AU - Nagata, Kenichi

AU - Daly-Flynn, Kelly

AU - Mansuripur, Masud

PY - 2002

Y1 - 2002

N2 - We report results of measurements of the optical constants of the dielectric layer (ZnS-SiO2), reflecting layer (aluminum-chromium alloy), and phase-change layer (GeSbTe, AgInSbTe) used as the media of phase-change optical recording. The refractive index n and the absorption coefficient k of these materials vary to some extent with the film thickness and with the film deposition environment. We report the observed variations of optical constants among samples of differing structure and among samples fabricated in different laboratories

AB - We report results of measurements of the optical constants of the dielectric layer (ZnS-SiO2), reflecting layer (aluminum-chromium alloy), and phase-change layer (GeSbTe, AgInSbTe) used as the media of phase-change optical recording. The refractive index n and the absorption coefficient k of these materials vary to some extent with the film thickness and with the film deposition environment. We report the observed variations of optical constants among samples of differing structure and among samples fabricated in different laboratories

KW - Ellipsometry

KW - Measurement of optical constants

KW - Optical data storage

KW - Optical recording

KW - Phase-change media

KW - Reflectometry

KW - Thin-film characterization

UR - http://www.scopus.com/inward/record.url?scp=0036378586&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0036378586&partnerID=8YFLogxK

U2 - 10.1117/12.453427

DO - 10.1117/12.453427

M3 - Article

AN - SCOPUS:0036378586

SN - 0277-786X

VL - 4342

SP - 134

EP - 145

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

ER -

Optical characterization of multilayer stacks for phase-change media

Abstract

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this