One step non-contact fabrication of polymer microlens arrays by thermocapillary lithography

Euan McLeod, Sandra M. Troian

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Thermocapillary lithography, a continuous-relief patterning technique, is used to fabricate polymer microlens arrays with variable pitch and focal length. Pattern definition results from sculpting by thermocapillary forces imposed by a cooled mask.

Original languageEnglish (US)
Title of host publicationCLEO
Subtitle of host publicationScience and Innovations, CLEO_SI 2011
StatePublished - 2011
Externally publishedYes
EventCLEO: Science and Innovations, CLEO_SI 2011 - Baltimore, MD, United States
Duration: May 1 2011May 6 2011

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Other

OtherCLEO: Science and Innovations, CLEO_SI 2011
Country/TerritoryUnited States
CityBaltimore, MD
Period5/1/115/6/11

ASJC Scopus subject areas

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

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