One-dimensional photonic crystal nanobeam cavities

J. Hendrickson; A. Homyk; A. Scherer; T. Alasaarela; A. Säynätjoki; S. Honkanen; B. C. Richards; J. Y. Kim; Y. H. Lee; R. Gibson; M. Gehl; J. D. Olitzky; S. Zandbergen; H. M. Gibbs; G. Khitrova

doi:10.1533/9780857096395.4.421

One-dimensional photonic crystal nanobeam cavities

J. Hendrickson, A. Homyk, A. Scherer, T. Alasaarela, A. Säynätjoki, S. Honkanen, B. C. Richards, J. Y. Kim, Y. H. Lee, R. Gibson, M. Gehl, J. D. Olitzky, S. Zandbergen, H. M. Gibbs, G. Khitrova

Optical Sciences, College of

Research output: Chapter in Book/Report/Conference proceeding › Chapter

4 Scopus citations

Abstract

The design, fabrication, and characterization of passive one-dimensional photonic crystal nanobeam cavities is presented. Silicon is chosen as the material system due to its ability to provide very high quality factors, a necessary prerequisite for solid state cavity quantum electrodynamics experiments, and its applicability to large scale hybrid device integration. Use of atomic layer deposition to conformally coat silicon on insulator nanobeam cavities with 20nm of Al₂O₃ is shown to increase quality factors by an average of 35% and a maximum of 124%.

Original language	English (US)
Title of host publication	Quantum Optics with Semiconductor Nanostructures
Publisher	Elsevier Ltd.
Pages	421-446
Number of pages	26
ISBN (Print)	9780857092328
DOIs	https://doi.org/10.1533/9780857096395.4.421
State	Published - Jul 2012

Keywords

Atomic layer deposition
Microcavities
Nanophotonics
Photonic crystals

ASJC Scopus subject areas

General Engineering

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10.1533/9780857096395.4.421

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Hendrickson, J., Homyk, A., Scherer, A., Alasaarela, T., Säynätjoki, A., Honkanen, S., Richards, B. C., Kim, J. Y., Lee, Y. H., Gibson, R., Gehl, M., Olitzky, J. D., Zandbergen, S., Gibbs, H. M., & Khitrova, G. (2012). One-dimensional photonic crystal nanobeam cavities. In Quantum Optics with Semiconductor Nanostructures (pp. 421-446). Elsevier Ltd.. https://doi.org/10.1533/9780857096395.4.421

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title = "One-dimensional photonic crystal nanobeam cavities",

abstract = "The design, fabrication, and characterization of passive one-dimensional photonic crystal nanobeam cavities is presented. Silicon is chosen as the material system due to its ability to provide very high quality factors, a necessary prerequisite for solid state cavity quantum electrodynamics experiments, and its applicability to large scale hybrid device integration. Use of atomic layer deposition to conformally coat silicon on insulator nanobeam cavities with 20nm of Al2O3 is shown to increase quality factors by an average of 35% and a maximum of 124%.",

keywords = "Atomic layer deposition, Microcavities, Nanophotonics, Photonic crystals",

author = "J. Hendrickson and A. Homyk and A. Scherer and T. Alasaarela and A. S{\"a}yn{\"a}tjoki and S. Honkanen and Richards, {B. C.} and Kim, {J. Y.} and Lee, {Y. H.} and R. Gibson and M. Gehl and Olitzky, {J. D.} and S. Zandbergen and Gibbs, {H. M.} and G. Khitrova",

note = "Funding Information: The UofA group acknowledges support from the National Science Foundation under AMOP (PHY-0757707), EPMD k(ECCS-1101341) and ERC CIAN (EEC-0812072); AFOSR (FA9550-10-1-0003); and JSOP (W911NF-10-1-0344).",

year = "2012",

month = jul,

doi = "10.1533/9780857096395.4.421",

language = "English (US)",

isbn = "9780857092328",

pages = "421--446",

booktitle = "Quantum Optics with Semiconductor Nanostructures",

publisher = "Elsevier Ltd.",

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TY - CHAP

T1 - One-dimensional photonic crystal nanobeam cavities

AU - Hendrickson, J.

AU - Homyk, A.

AU - Scherer, A.

AU - Alasaarela, T.

AU - Säynätjoki, A.

AU - Honkanen, S.

AU - Richards, B. C.

AU - Kim, J. Y.

AU - Lee, Y. H.

AU - Gibson, R.

AU - Gehl, M.

AU - Olitzky, J. D.

AU - Zandbergen, S.

AU - Gibbs, H. M.

AU - Khitrova, G.

N1 - Funding Information: The UofA group acknowledges support from the National Science Foundation under AMOP (PHY-0757707), EPMD k(ECCS-1101341) and ERC CIAN (EEC-0812072); AFOSR (FA9550-10-1-0003); and JSOP (W911NF-10-1-0344).

PY - 2012/7

Y1 - 2012/7

N2 - The design, fabrication, and characterization of passive one-dimensional photonic crystal nanobeam cavities is presented. Silicon is chosen as the material system due to its ability to provide very high quality factors, a necessary prerequisite for solid state cavity quantum electrodynamics experiments, and its applicability to large scale hybrid device integration. Use of atomic layer deposition to conformally coat silicon on insulator nanobeam cavities with 20nm of Al2O3 is shown to increase quality factors by an average of 35% and a maximum of 124%.

AB - The design, fabrication, and characterization of passive one-dimensional photonic crystal nanobeam cavities is presented. Silicon is chosen as the material system due to its ability to provide very high quality factors, a necessary prerequisite for solid state cavity quantum electrodynamics experiments, and its applicability to large scale hybrid device integration. Use of atomic layer deposition to conformally coat silicon on insulator nanobeam cavities with 20nm of Al2O3 is shown to increase quality factors by an average of 35% and a maximum of 124%.

KW - Atomic layer deposition

KW - Microcavities

KW - Nanophotonics

KW - Photonic crystals

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M3 - Chapter

AN - SCOPUS:84903800738

SN - 9780857092328

SP - 421

EP - 446

BT - Quantum Optics with Semiconductor Nanostructures

PB - Elsevier Ltd.

ER -

One-dimensional photonic crystal nanobeam cavities

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Keywords

ASJC Scopus subject areas

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