One-dimensional photonic crystal nanobeam cavities

J. Hendrickson, A. Homyk, A. Scherer, T. Alasaarela, A. Säynätjoki, S. Honkanen, B. C. Richards, J. Y. Kim, Y. H. Lee, R. Gibson, M. Gehl, J. D. Olitzky, S. Zandbergen, H. M. Gibbs, G. Khitrova

Research output: Chapter in Book/Report/Conference proceedingChapter

3 Scopus citations


The design, fabrication, and characterization of passive one-dimensional photonic crystal nanobeam cavities is presented. Silicon is chosen as the material system due to its ability to provide very high quality factors, a necessary prerequisite for solid state cavity quantum electrodynamics experiments, and its applicability to large scale hybrid device integration. Use of atomic layer deposition to conformally coat silicon on insulator nanobeam cavities with 20nm of Al2O3 is shown to increase quality factors by an average of 35% and a maximum of 124%.

Original languageEnglish (US)
Title of host publicationQuantum Optics with Semiconductor Nanostructures
PublisherElsevier Ltd.
Number of pages26
ISBN (Print)9780857092328
StatePublished - Jul 2012


  • Atomic layer deposition
  • Microcavities
  • Nanophotonics
  • Photonic crystals

ASJC Scopus subject areas

  • General Engineering


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