@article{1a4d17d74f2f41e38f2a72e55584d9b6,
title = "On the observation of dispersion in tunable second-order nonlinearities of silicon-rich nitride thin films",
abstract = "We present experimental results on second-harmonic generation in non-stoichiometric, silicon-rich nitride films. The as-deposited film presents a second-order nonlinear coefficient, or χ(2), as high as 8 pm/V. This value can be widely tuned using the electric field induced second harmonic effect, and a maximum value of 22.7 pm/V was achieved with this technique. We further illustrate that the second-order nonlinear coefficient exhibited by these films can be highly dispersive in nature and require further study and analysis to evaluate their viability for in-waveguide applications at telecommunication wavelengths.",
author = "Lin, {Hung Hsi} and Rajat Sharma and Alex Friedman and Cromey, {Benjamin M.} and Felipe Vallini and Puckett, {Matthew W.} and Khanh Kieu and Yeshaiahu Fainman",
note = "Funding Information: This work was supported by the Defense Advanced Research Projects Agency (DARPA), the National Science Foundation (NSF), the NSF ERC CIAN, NSF's NNCI San Diego Nanotechnology Infrastructure (SDNI), the NSF Graduate Research Fellowship under No. DGE-1143953, the Office of Naval Research (ONR) Multidisciplinary University Research Initiative (MURI), the Army Research Office (ARO), and the Cymer Corporation. We thank UCSD's staff Ryan Anderson for the discussion on the equipment for electrical characterization. Funding Information: This work was supported by the Defense Advanced Research Projects Agency (DARPA), the National Science Foundation (NSF), the NSF ERC CIAN, NSF{\textquoteright}s NNCI San Diego Nanotechnology Infrastructure (SDNI), the NSF Graduate Research Fellowship under No. DGE-1143953, the Office of Naval Research (ONR) Multidisciplinary University Research Initiative (MURI), the Army Research Office (ARO), and the Cymer Corporation. We thank UCSD{\textquoteright}s staff Ryan Anderson for the discussion on the equipment for electrical characterization. Publisher Copyright: {\textcopyright} 2019 Author(s).",
year = "2019",
month = mar,
day = "1",
doi = "10.1063/1.5053704",
language = "English (US)",
volume = "4",
journal = "APL Photonics",
issn = "2378-0967",
publisher = "AIP Publishing LLC",
number = "3",
}