On-line measurement system for monitoring ring tool misalignments

Tong Xie; John E. Greivenkamp

doi:10.1117/12.295150

On-line measurement system for monitoring ring tool misalignments

Research output: Contribution to journal › Conference article › peer-review

Abstract

A new metrology technique was developed for on-line tool misalignment detection. It is an image based metrology system. It measures surface slope functions from the captured reflected image off the test surface. The measured surface slope function is then used to determine the corresponding tool misalignments in the ring grinding setup for the Opticam surface generator. A prototype detection system was built and tested on-line in the Opticam machine. The experimental results are presented in this paper.

Original language	English (US)
Pages (from-to)	494-503
Number of pages	10
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	3134
DOIs	https://doi.org/10.1117/12.295150
State	Published - 1997
Event	Optical Manufacturing and Testing II - San Diego, CA, United States Duration: Jul 27 1997 → Jul 27 1997

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.295150

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title = "On-line measurement system for monitoring ring tool misalignments",

abstract = "A new metrology technique was developed for on-line tool misalignment detection. It is an image based metrology system. It measures surface slope functions from the captured reflected image off the test surface. The measured surface slope function is then used to determine the corresponding tool misalignments in the ring grinding setup for the Opticam surface generator. A prototype detection system was built and tested on-line in the Opticam machine. The experimental results are presented in this paper.",

author = "Tong Xie and Greivenkamp, {John E.}",

year = "1997",

doi = "10.1117/12.295150",

language = "English (US)",

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note = "Optical Manufacturing and Testing II ; Conference date: 27-07-1997 Through 27-07-1997",

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AU - Greivenkamp, John E.

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AB - A new metrology technique was developed for on-line tool misalignment detection. It is an image based metrology system. It measures surface slope functions from the captured reflected image off the test surface. The measured surface slope function is then used to determine the corresponding tool misalignments in the ring grinding setup for the Opticam surface generator. A prototype detection system was built and tested on-line in the Opticam machine. The experimental results are presented in this paper.

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JF - Proceedings of SPIE - The International Society for Optical Engineering

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ER -

On-line measurement system for monitoring ring tool misalignments

Abstract

ASJC Scopus subject areas

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