On-axis deflectometric system for freeform surface measurement

Research output: Contribution to journalArticlepeer-review

Abstract

We propose an on-axis deflectometric system for the accurate measurement of freeform surfaces with large slope ranges. A miniature plane mirror is attached on the illumination screen to fold the optical path and achieve the on-axis deflectometric testing. Due to the existence of the miniature folding mirror, the deep-learning method is applied to recover the missing surface data in a single measurement. Low sensitivity to the calibration error of system geometry and high testing accuracy can be achieved with the proposed system. The feasibility and accuracy of the proposed system have been validated. The system is low in cost and simple in configuration, and it provides a feasible way for the flexible and general testing of freeform surfaces, with a significant potential of the application in on-machine testing.

Original languageEnglish (US)
Pages (from-to)1986-1989
Number of pages4
JournalOptics letters
Volume48
Issue number8
DOIs
StatePublished - Apr 15 2023

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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