Novel slurry injection system for improved slurry flow and reduced defects in CMP

Ara Philipossian, Len Borucki, Yasa Sampurno, Yun Zhuang

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

12 Scopus citations

Fingerprint

Dive into the research topics of 'Novel slurry injection system for improved slurry flow and reduced defects in CMP'. Together they form a unique fingerprint.