@inproceedings{0cfb3e56bcde4043a84d17669ea6856c,
title = "Novel method for ultra rapid determination of the lubrication mechanisms in tungsten, copper, STI and ILD CMP",
author = "Ruochen Han and Matthew Bahr and Yasa Sampurno and Ara Philipossian",
year = "2017",
language = "English (US)",
series = "ICPT 2017 - International Conference on Planarization/CMP Technology",
publisher = "VDE Verlag GmbH",
pages = "31",
booktitle = "ICPT 2017 - International Conference on Planarization/CMP Technology",
address = "Germany",
note = "2017 International Conference on Planarization/CMP Technology, ICPT 2017 ; Conference date: 11-10-2017 Through 13-10-2017",
}