@inproceedings{15380b74d1e14e9b96002d25c1cdc05d,
title = "Non-touch thermal air-bearing shaping of x-ray telescope optics",
abstract = "Molding glass by using air bearings is a promising procedure for inexpensive and high precision glass shaping. Thin glass sheets are sandwiched between air bearings and pushed flat while being thermally cycled. In this study, a novel device for shaping glass is created and tested using 0.5 mm thick, 100 mm round, Schott D263 wafers. Numerous samples were shaped with varying values for bearing-to-glass gap and maximum temperature, and were measured with a Shack Hartmann metrology tool. Glass was shaped with bearing-to-glass gaps of >50 μm, 36±2.5 μm, and 30.5±2.5 μm. The best peak-to-valley (P-V) flatness achieved is 6.7/3.6±0.5 μm for front/back of the glass sheet, using a gap of 36±2.5 μm. The average steady-state P-V achieved is 12 μm. Using the same device parameters, the best repeatability achieved over the whole 100 mm wafer is 2.7±0.5 μm P-V and 9.5 arcseconds RMS slope error. When looking at 60 mm sections, the repeatability improves to <1 μm P-V and 5±0.5 arcsec.",
keywords = "air bearing, glass, molding, non-contact, shear force, slumping, wafer",
author = "Edward Sung and Brandon Chalifoux and Schattenburg, {Mark L.} and Heilmann, {Ralf K.}",
year = "2013",
doi = "10.1117/12.2026100",
language = "English (US)",
isbn = "9780819497116",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Optics for EUV, X-Ray, and Gamma-Ray Astronomy VI",
note = "Optics for EUV, X-Ray, and Gamma-Ray Astronomy VI ; Conference date: 26-08-2013 Through 29-08-2013",
}