TY - JOUR
T1 - Non-null full field X-ray mirror metrology using scots
T2 - A reflection deflectometry approach
AU - Su, Peng
AU - Wang, Yuhao
AU - Burge, James H.
AU - Kaznatcheev, Konstantine
AU - Idir, Mourad
PY - 2012/5/21
Y1 - 2012/5/21
N2 - In a previous paper, the University of Arizona (UA) has developed a measurement technique called: Software Configurable Optical Test System (SCOTS) based on the principle of reflection deflectometry. In this paper, we present results of this very efficient optical metrology method applied to the metrology of X-ray mirrors. We used this technique to measure surface slope errors with precision and accuracy better than 100 nrad (rms) and ∼200 nrad (rms), respectively, with a lateral resolution of few mm or less. We present results of the calibration of the metrology systems, discuss their accuracy and address the precision in measuring a spherical mirror.
AB - In a previous paper, the University of Arizona (UA) has developed a measurement technique called: Software Configurable Optical Test System (SCOTS) based on the principle of reflection deflectometry. In this paper, we present results of this very efficient optical metrology method applied to the metrology of X-ray mirrors. We used this technique to measure surface slope errors with precision and accuracy better than 100 nrad (rms) and ∼200 nrad (rms), respectively, with a lateral resolution of few mm or less. We present results of the calibration of the metrology systems, discuss their accuracy and address the precision in measuring a spherical mirror.
UR - http://www.scopus.com/inward/record.url?scp=84861492197&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84861492197&partnerID=8YFLogxK
U2 - 10.1364/OE.20.012393
DO - 10.1364/OE.20.012393
M3 - Article
C2 - 22714226
AN - SCOPUS:84861492197
SN - 1094-4087
VL - 20
SP - 12393
EP - 12406
JO - Optics Express
JF - Optics Express
IS - 11
ER -