NIR high-efficiency subwavelength diffractive structures in semiconductors

Keyphrases

• High Efficiency 100%
• Semiconductors 100%
• Subwavelength 100%
• Diffractive Structures 100%
• Diffraction Efficiency 50%
• Gallium Arsenide 50%
• First-order 50%
• Blazed Transmission Grating 50%
• Electron Beam Lithography 50%
• Transmission Measurement 50%
• Binary Phase 50%
• Diffractive Optics 50%
• Rigorous Coupled-wave Analysis 50%
• Phase Profile 50%
• Direct Ink Writing 50%
• Reactive Ion Beam Etching 50%
• Antireflection Surfaces 50%

Material Science

• Gallium Arsenide 100%
• Lithography 100%