@inproceedings{eb017d286aba4d598debf33df127b798,
title = "NIR high-efficiency subwavelength diffractive structures in semiconductors",
abstract = "We have fabricated sub-wavelength diffractive optical elements with binary phase profiles for operation at 975 nm. Blazed transmission gratings with minimum features 63 nm wide were designed by using rigorous coupled-wave analysis and fabricated by direct-write e-beam lithography and reactive ion beam etching in gallium arsenide. Transmission measurements show 85% diffraction efficiency into the first order. Anti-reflection surfaces, with features 42 nm wide were also designed and fabricated.",
author = "Smith, {Robert E.} and Warren, {Mial E.} and Wendt, {Joel R.} and Vawter, {Gregory A.}",
year = "1995",
language = "English (US)",
isbn = "0819417513",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "Society of Photo-Optical Instrumentation Engineers",
pages = "122--128",
booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",
note = "Diffractive and Holographic Optics Technology II ; Conference date: 09-02-1995 Through 10-02-1995",
}