Abstract
A novel metal-induced lateral crystallization (MILC) technique has been applied to the formation of polycrystalline silicon (poly-Si) with greatly enhanced material characteristics. Compared to conventional poly-Si, MILC poly-Si gives rise to much improved performance not only in sensors but also in thin film transistors. A variety of sensing and electronic devices can be realized simultaneously on MILC poly-Si, thus making MILC an enabling technology for integrated silicon micro-machining.
| Original language | English (US) |
|---|---|
| Pages | 114-119 |
| Number of pages | 6 |
| State | Published - 2000 |
| Event | 13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000) - Miyazaki, Jpn Duration: Jan 23 2000 → Jan 27 2000 |
Other
| Other | 13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000) |
|---|---|
| City | Miyazaki, Jpn |
| Period | 1/23/00 → 1/27/00 |
ASJC Scopus subject areas
- Control and Systems Engineering
- Mechanical Engineering
- Electrical and Electronic Engineering