Near-field solid immersion lens (SIL) microscope with advanced compact mechanical design

Tao Chen; David Felix; Sang Ki Park; Paul Hauser; Brendan McCarthy; Dror Sarid; Christian Poweleit; Jose Menendez; Tom Milster

doi:10.1117/12.557055

Near-field solid immersion lens (SIL) microscope with advanced compact mechanical design

Tao Chen, David Felix, Sang Ki Park, Paul Hauser, Brendan McCarthy, Dror Sarid, Christian Poweleit, Jose Menendez, Tom Milster

Research output: Contribution to journal › Conference article › peer-review

3 Scopus citations

Abstract

A compact mechanical package is developed for a standard microscope that implements a solid immersion lens (SIL) on a retractable bimorph swing arm. With the compact package mounted on an inverted microscope, far-field and near-field images are obtained at the same location by moving the SIL in place with the swing arm. With white-light incoherent illumination, the resolution of this system for observing digital versatile discs (DVDs) is around 200nm with an effective NA of 1.5. Imaging with the SIL is compared to an atomic force microscopy (AFM) scan.

Original language	English (US)
Pages (from-to)	634-641
Number of pages	8
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	5380
DOIs	https://doi.org/10.1117/12.557055
State	Published - 2004
Event	Optical Data Storage 2004 - Monterey, CA, United States Duration: Apr 18 2004 → Apr 21 2004

Keywords

Microscopy
Near-field
Optical data storage
Solid immersion lens

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.557055

Cite this

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title = "Near-field solid immersion lens (SIL) microscope with advanced compact mechanical design",

abstract = "A compact mechanical package is developed for a standard microscope that implements a solid immersion lens (SIL) on a retractable bimorph swing arm. With the compact package mounted on an inverted microscope, far-field and near-field images are obtained at the same location by moving the SIL in place with the swing arm. With white-light incoherent illumination, the resolution of this system for observing digital versatile discs (DVDs) is around 200nm with an effective NA of 1.5. Imaging with the SIL is compared to an atomic force microscopy (AFM) scan.",

keywords = "Microscopy, Near-field, Optical data storage, Solid immersion lens",

author = "Tao Chen and David Felix and Park, {Sang Ki} and Paul Hauser and Brendan McCarthy and Dror Sarid and Christian Poweleit and Jose Menendez and Tom Milster",

year = "2004",

doi = "10.1117/12.557055",

language = "English (US)",

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journal = "Proceedings of SPIE - The International Society for Optical Engineering",

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note = "Optical Data Storage 2004 ; Conference date: 18-04-2004 Through 21-04-2004",

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T1 - Near-field solid immersion lens (SIL) microscope with advanced compact mechanical design

AU - Chen, Tao

AU - Felix, David

AU - Park, Sang Ki

AU - Hauser, Paul

AU - McCarthy, Brendan

AU - Sarid, Dror

AU - Poweleit, Christian

AU - Menendez, Jose

AU - Milster, Tom

PY - 2004

Y1 - 2004

N2 - A compact mechanical package is developed for a standard microscope that implements a solid immersion lens (SIL) on a retractable bimorph swing arm. With the compact package mounted on an inverted microscope, far-field and near-field images are obtained at the same location by moving the SIL in place with the swing arm. With white-light incoherent illumination, the resolution of this system for observing digital versatile discs (DVDs) is around 200nm with an effective NA of 1.5. Imaging with the SIL is compared to an atomic force microscopy (AFM) scan.

AB - A compact mechanical package is developed for a standard microscope that implements a solid immersion lens (SIL) on a retractable bimorph swing arm. With the compact package mounted on an inverted microscope, far-field and near-field images are obtained at the same location by moving the SIL in place with the swing arm. With white-light incoherent illumination, the resolution of this system for observing digital versatile discs (DVDs) is around 200nm with an effective NA of 1.5. Imaging with the SIL is compared to an atomic force microscopy (AFM) scan.

KW - Microscopy

KW - Near-field

KW - Optical data storage

KW - Solid immersion lens

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SP - 634

EP - 641

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

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ER -

Near-field solid immersion lens (SIL) microscope with advanced compact mechanical design

Abstract

Keywords

ASJC Scopus subject areas

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