Near-field solid immersion lens (SIL) microscope with advanced compact mechanical design

Tao Chen, David Felix, Sang Ki Park, Paul Hauser, Brendan McCarthy, Dror Sarid, Christian Poweleit, Jose Menendez, Tom Milster

Research output: Contribution to journalConference articlepeer-review

3 Scopus citations


A compact mechanical package is developed for a standard microscope that implements a solid immersion lens (SIL) on a retractable bimorph swing arm. With the compact package mounted on an inverted microscope, far-field and near-field images are obtained at the same location by moving the SIL in place with the swing arm. With white-light incoherent illumination, the resolution of this system for observing digital versatile discs (DVDs) is around 200nm with an effective NA of 1.5. Imaging with the SIL is compared to an atomic force microscopy (AFM) scan.

Original languageEnglish (US)
Pages (from-to)634-641
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 2004
EventOptical Data Storage 2004 - Monterey, CA, United States
Duration: Apr 18 2004Apr 21 2004


  • Microscopy
  • Near-field
  • Optical data storage
  • Solid immersion lens

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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