Near-field solid immersion lens (SIL) microscope

Tao Chen, David Felix, Sang Ki Park, Brendan McCarthy, Dror Sarid, Tom Milster

Research output: Chapter in Book/Report/Conference proceedingConference contribution


A near-field solid immersion lens (SIL) microscope is developed for a standard microscope. With white-light incoherent illumination, the resolution of this system for observing DVDs pits is around 200nm with an effective NA of 1.5.

Original languageEnglish (US)
Title of host publicationFrontiers in Optics, FiO 2005
PublisherOptical Society of America (OSA)
ISBN (Print)1557527970, 9781557527974
StatePublished - 2005
EventFrontiers in Optics, FiO 2005 - Tucson, AZ, United States
Duration: Oct 16 2005Oct 21 2005

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701


OtherFrontiers in Optics, FiO 2005
Country/TerritoryUnited States
CityTucson, AZ

ASJC Scopus subject areas

  • Instrumentation
  • Atomic and Molecular Physics, and Optics


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