Near-field induced polarization imaging for optical data storage metrology

Tao Chen; Tom D. Muster

doi:10.1117/12.685172

Near-field induced polarization imaging for optical data storage metrology

Tao Chen, Tom D. Muster

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Scopus citations

Abstract

Near-field induced polarization imaging with a solid immersion lens (SIL) is used to provide high lateral resolution compared with conventional far-field microscopy. In addition, a new technique is used to obtain height information from the near-field induced polarization (cross polarized) image. Several optical data storage samples, including DVD-R, DVD-RW, BD-RW, are studied with this imaging technique. A calibration target indicates an accuracy of ± 2nm for obtaining height information.

Original language	English (US)
Title of host publication	Optical Data Storage 2006
DOIs	https://doi.org/10.1117/12.685172
State	Published - 2006
Event	Optical Data Storage 2006 - Montreal, Canada Duration: Apr 23 2006 → Apr 26 2006

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	6282
ISSN (Print)	0277-786X

Other

Other	Optical Data Storage 2006
Country/Territory	Canada
City	Montreal
Period	4/23/06 → 4/26/06

Keywords

High resolution
Near-field
Solid immersion lens (SIL)
Topographical image

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.685172

Cite this

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title = "Near-field induced polarization imaging for optical data storage metrology",

abstract = "Near-field induced polarization imaging with a solid immersion lens (SIL) is used to provide high lateral resolution compared with conventional far-field microscopy. In addition, a new technique is used to obtain height information from the near-field induced polarization (cross polarized) image. Several optical data storage samples, including DVD-R, DVD-RW, BD-RW, are studied with this imaging technique. A calibration target indicates an accuracy of ± 2nm for obtaining height information.",

keywords = "High resolution, Near-field, Solid immersion lens (SIL), Topographical image",

author = "Tao Chen and Muster, {Tom D.}",

year = "2006",

doi = "10.1117/12.685172",

language = "English (US)",

isbn = "0819463574",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

booktitle = "Optical Data Storage 2006",

note = "Optical Data Storage 2006 ; Conference date: 23-04-2006 Through 26-04-2006",

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AU - Chen, Tao

AU - Muster, Tom D.

PY - 2006

Y1 - 2006

N2 - Near-field induced polarization imaging with a solid immersion lens (SIL) is used to provide high lateral resolution compared with conventional far-field microscopy. In addition, a new technique is used to obtain height information from the near-field induced polarization (cross polarized) image. Several optical data storage samples, including DVD-R, DVD-RW, BD-RW, are studied with this imaging technique. A calibration target indicates an accuracy of ± 2nm for obtaining height information.

AB - Near-field induced polarization imaging with a solid immersion lens (SIL) is used to provide high lateral resolution compared with conventional far-field microscopy. In addition, a new technique is used to obtain height information from the near-field induced polarization (cross polarized) image. Several optical data storage samples, including DVD-R, DVD-RW, BD-RW, are studied with this imaging technique. A calibration target indicates an accuracy of ± 2nm for obtaining height information.

KW - High resolution

KW - Near-field

KW - Solid immersion lens (SIL)

KW - Topographical image

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DO - 10.1117/12.685172

M3 - Conference contribution

AN - SCOPUS:33748043657

SN - 0819463574

SN - 9780819463579

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Optical Data Storage 2006

T2 - Optical Data Storage 2006

Y2 - 23 April 2006 through 26 April 2006

ER -

Near-field induced polarization imaging for optical data storage metrology

Abstract

Publication series

Other

Keywords

ASJC Scopus subject areas

Access to Document

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