Near-field induced polarization imaging for optical data storage metrology

Tao Chen, Tom D. Muster

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations


Near-field induced polarization imaging with a solid immersion lens (SIL) is used to provide high lateral resolution compared with conventional far-field microscopy. In addition, a new technique is used to obtain height information from the near-field induced polarization (cross polarized) image. Several optical data storage samples, including DVD-R, DVD-RW, BD-RW, are studied with this imaging technique. A calibration target indicates an accuracy of ± 2nm for obtaining height information.

Original languageEnglish (US)
Title of host publicationOptical Data Storage 2006
StatePublished - 2006
EventOptical Data Storage 2006 - Montreal, Canada
Duration: Apr 23 2006Apr 26 2006

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


OtherOptical Data Storage 2006


  • High resolution
  • Near-field
  • Solid immersion lens (SIL)
  • Topographical image

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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