@inproceedings{95cbca3380754c1c8ed0593b350a31c8,
title = "Near-field induced polarization imaging for optical data storage metrology",
abstract = "Near-field induced polarization imaging with a solid immersion lens (SIL) is used to provide high lateral resolution compared with conventional far-field microscopy. In addition, a new technique is used to obtain height information from the near-field induced polarization (cross polarized) image. Several optical data storage samples, including DVD-R, DVD-RW, BD-RW, are studied with this imaging technique. A calibration target indicates an accuracy of ± 2nm for obtaining height information.",
keywords = "High resolution, Near-field, Solid immersion lens (SIL), Topographical image",
author = "Tao Chen and Muster, {Tom D.}",
year = "2006",
doi = "10.1117/12.685172",
language = "English (US)",
isbn = "0819463574",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Optical Data Storage 2006",
note = "Optical Data Storage 2006 ; Conference date: 23-04-2006 Through 26-04-2006",
}