Nanostructure imaging with sub-THz coherent acoustic phonon pulses

B. C. Daly; N. C.R. Holme; C. Branciard; T. B. Norris; S. Pau; D. M. Tennant; J. A. Taylor; J. E. Bower

Nanostructure imaging with sub-THz coherent acoustic phonon pulses

B. C. Daly
, N. C.R. Holme
, C. Branciard
, T. B. Norris
, S. Pau
, D. M. Tennant
, J. A. Taylor
, J. E. Bower

Research output: Contribution to journal › Conference article › peer-review

Abstract

We describe a novel imaging technique that employs coherent acoustic phonon pulses which are generated and detected by ultrafast optical methods. Sub-micron resolution images of Al lines lithographically etched on a Si substrate are shown.

Original language	English (US)
Pages (from-to)	159-160
Number of pages	2
Journal	OSA Trends in Optics and Photonics Series
Volume	97
State	Published - 2004
Externally published	Yes
Event	International Quantum Electronics Conference, IQEC - San Francisco, CA, United States Duration: May 21 2004 → May 26 2004

ASJC Scopus subject areas

General Engineering

Cite this

@article{6ed21db901a84250b5417e7d8ad071e9,

title = "Nanostructure imaging with sub-THz coherent acoustic phonon pulses",

abstract = "We describe a novel imaging technique that employs coherent acoustic phonon pulses which are generated and detected by ultrafast optical methods. Sub-micron resolution images of Al lines lithographically etched on a Si substrate are shown.",

author = "Daly, \{B. C.\} and Holme, \{N. C.R.\} and C. Branciard and Norris, \{T. B.\} and S. Pau and Tennant, \{D. M.\} and Taylor, \{J. A.\} and Bower, \{J. E.\}",

year = "2004",

language = "English (US)",

volume = "97",

pages = "159--160",

journal = "OSA Trends in Optics and Photonics Series",

issn = "1094-5695",

note = "International Quantum Electronics Conference, IQEC ; Conference date: 21-05-2004 Through 26-05-2004",

}

TY - JOUR

T1 - Nanostructure imaging with sub-THz coherent acoustic phonon pulses

AU - Daly, B. C.

AU - Holme, N. C.R.

AU - Branciard, C.

AU - Norris, T. B.

AU - Pau, S.

AU - Tennant, D. M.

AU - Taylor, J. A.

AU - Bower, J. E.

PY - 2004

Y1 - 2004

N2 - We describe a novel imaging technique that employs coherent acoustic phonon pulses which are generated and detected by ultrafast optical methods. Sub-micron resolution images of Al lines lithographically etched on a Si substrate are shown.

AB - We describe a novel imaging technique that employs coherent acoustic phonon pulses which are generated and detected by ultrafast optical methods. Sub-micron resolution images of Al lines lithographically etched on a Si substrate are shown.

UR - https://www.scopus.com/pages/publications/33645232971

UR - https://www.scopus.com/pages/publications/33645232971#tab=citedBy

M3 - Conference article

AN - SCOPUS:33645232971

SN - 1094-5695

VL - 97

SP - 159

EP - 160

JO - OSA Trends in Optics and Photonics Series

JF - OSA Trends in Optics and Photonics Series

T2 - International Quantum Electronics Conference, IQEC

Y2 - 21 May 2004 through 26 May 2004

ER -

Nanostructure imaging with sub-THz coherent acoustic phonon pulses

Abstract

ASJC Scopus subject areas

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