We describe a novel imaging technique that employs coherent acoustic phonon pulses which are generated and detected by ultrafast optical methods. Sub-micron resolution images of Al lines lithographically etched on a Si substrate are shown.
|Original language||English (US)|
|Number of pages||2|
|Journal||OSA Trends in Optics and Photonics Series|
|State||Published - 2004|
|Event||International Quantum Electronics Conference, IQEC - San Francisco, CA, United States|
Duration: May 21 2004 → May 26 2004
ASJC Scopus subject areas