@inproceedings{2e7e04b6594347a9b6346726c8dc0fcd,
title = "Nanoscale imaging with coherent acoustic phonon pulses",
abstract = "We describe ultrafast coherent acoustic phonon measurements of a latent photoresist pattern with 1 pm features that is buried beneath an A1 film. Simulation results for higher resolution measurements are also described.",
author = "J. Klein and Norris, \{T. B.\} and Daly, \{B. C.\} and S. Pau and Tennant, \{D. M.\} and Taylor, \{J. A.\} and Bower, \{J. E.\}",
year = "2006",
language = "English (US)",
isbn = "1557528136",
series = "Optics InfoBase Conference Papers",
publisher = "Optical Society of America",
booktitle = "Quantum Electronics and Laser Science Conference, QELS 2006",
note = "Quantum Electronics and Laser Science Conference, QELS 2006 ; Conference date: 21-05-2006 Through 21-05-2006",
}