Nanoscale imaging with coherent acoustic phonon pulses

J. Klein; T. B. Norris; B. C. Daly; S. Pau; D. M. Tennant; J. A. Taylor; J. E. Bower

doi:10.1109/CLEO.2006.4628910

Nanoscale imaging with coherent acoustic phonon pulses

J. Klein, T. B. Norris, B. C. Daly, S. Pau, D. M. Tennant, J. A. Taylor, J. E. Bower

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We describe ultrafast coherent acoustic phonon measurements of a latent photoresist pattern with 1 μm features that is buried beneath an Al film. Simulation results for higher resolution measurements are also described.

Original language	English (US)
Title of host publication	Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference, CLEO/QELS 2006
DOIs	https://doi.org/10.1109/CLEO.2006.4628910
State	Published - 2006
Event	Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference, CLEO/QELS 2006 - Long Beach, CA, United States Duration: May 21 2006 → May 26 2006

Publication series

Name	Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference, CLEO/QELS 2006

Other

Other	Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference, CLEO/QELS 2006
Country/Territory	United States
City	Long Beach, CA
Period	5/21/06 → 5/26/06

ASJC Scopus subject areas

Electrical and Electronic Engineering
Atomic and Molecular Physics, and Optics

Access to Document

10.1109/CLEO.2006.4628910

Cite this

Klein, J., Norris, T. B., Daly, B. C., Pau, S., Tennant, D. M., Taylor, J. A., & Bower, J. E. (2006). Nanoscale imaging with coherent acoustic phonon pulses. In Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference, CLEO/QELS 2006 [4628910] (Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference, CLEO/QELS 2006). https://doi.org/10.1109/CLEO.2006.4628910

Nanoscale imaging with coherent acoustic phonon pulses. / Klein, J.; Norris, T. B.; Daly, B. C. et al.
Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference, CLEO/QELS 2006. 2006. 4628910 (Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference, CLEO/QELS 2006).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Klein, J, Norris, TB, Daly, BC, Pau, S, Tennant, DM, Taylor, JA & Bower, JE 2006, Nanoscale imaging with coherent acoustic phonon pulses. in Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference, CLEO/QELS 2006., 4628910, Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference, CLEO/QELS 2006, Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference, CLEO/QELS 2006, Long Beach, CA, United States, 5/21/06. https://doi.org/10.1109/CLEO.2006.4628910

Klein J, Norris TB, Daly BC, Pau S, Tennant DM, Taylor JA et al. Nanoscale imaging with coherent acoustic phonon pulses. In Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference, CLEO/QELS 2006. 2006. 4628910. (Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference, CLEO/QELS 2006). doi: 10.1109/CLEO.2006.4628910

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title = "Nanoscale imaging with coherent acoustic phonon pulses",

abstract = "We describe ultrafast coherent acoustic phonon measurements of a latent photoresist pattern with 1 μm features that is buried beneath an Al film. Simulation results for higher resolution measurements are also described.",

author = "J. Klein and Norris, {T. B.} and Daly, {B. C.} and S. Pau and Tennant, {D. M.} and Taylor, {J. A.} and Bower, {J. E.}",

year = "2006",

doi = "10.1109/CLEO.2006.4628910",

language = "English (US)",

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series = "Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference, CLEO/QELS 2006",

booktitle = "Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference, CLEO/QELS 2006",

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AU - Klein, J.

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AU - Taylor, J. A.

AU - Bower, J. E.

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N2 - We describe ultrafast coherent acoustic phonon measurements of a latent photoresist pattern with 1 μm features that is buried beneath an Al film. Simulation results for higher resolution measurements are also described.

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T3 - Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference, CLEO/QELS 2006

BT - Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference, CLEO/QELS 2006

T2 - Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference, CLEO/QELS 2006

Y2 - 21 May 2006 through 26 May 2006

ER -

Nanoscale imaging with coherent acoustic phonon pulses

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ASJC Scopus subject areas

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