@inproceedings{fcdd5938bb3f4aa79d893659ea15ced4,
title = "Nanoscale imaging with coherent acoustic phonon pulses",
abstract = "We describe ultrafast coherent acoustic phonon measurements of a latent photoresist pattern with 1 μm features that is buried beneath an Al film. Simulation results for higher resolution measurements are also described.",
author = "J. Klein and Norris, {T. B.} and Daly, {B. C.} and S. Pau and Tennant, {D. M.} and Taylor, {J. A.} and Bower, {J. E.}",
year = "2006",
doi = "10.1109/CLEO.2006.4628910",
language = "English (US)",
isbn = "1557528136",
series = "Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference, CLEO/QELS 2006",
booktitle = "Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference, CLEO/QELS 2006",
note = "Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference, CLEO/QELS 2006 ; Conference date: 21-05-2006 Through 26-05-2006",
}