@inproceedings{2e7e04b6594347a9b6346726c8dc0fcd,
title = "Nanoscale imaging with coherent acoustic phonon pulses",
abstract = "We describe ultrafast coherent acoustic phonon measurements of a latent photoresist pattern with 1 pm features that is buried beneath an A1 film. Simulation results for higher resolution measurements are also described.",
author = "J. Klein and Norris, {T. B.} and Daly, {B. C.} and S. Pau and Tennant, {D. M.} and Taylor, {J. A.} and Bower, {J. E.}",
year = "2006",
language = "English (US)",
isbn = "1557528136",
series = "Optics InfoBase Conference Papers",
publisher = "Optical Society of America",
booktitle = "Quantum Electronics and Laser Science Conference, QELS 2006",
note = "Quantum Electronics and Laser Science Conference, QELS 2006 ; Conference date: 21-05-2006 Through 21-05-2006",
}