Nanolaminate structures fabricated by ALD for reducing propagation losses and enhancing the third-order optical nonlinearities

Lasse Karvonen; Tapani Alasaarela; Henri Jussila; Soroush Mehravar; Ya Chen; Antti Säynätjoki; Robert A. Norwood; Nasser Peyghambarian; Khanh Kieu; Seppo Honkanen; Harri Lipsanen

doi:10.1117/12.2045006

Nanolaminate structures fabricated by ALD for reducing propagation losses and enhancing the third-order optical nonlinearities

Lasse Karvonen, Tapani Alasaarela, Henri Jussila, Soroush Mehravar, Ya Chen, Antti Säynätjoki, Robert A. Norwood, Nasser Peyghambarian, Khanh Kieu, Seppo Honkanen, Harri Lipsanen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

7 Scopus citations

Abstract

We demonstrate a novel atomic layer deposition (ALD) process to make high quality nanocrystalline titanium dioxide (TiO₂) and zinc oxide (ZnO) with intermediate Al₂O₃ layers to limit the crystal size. The waveguide losses of TiO₂/Al₂O₃ nanolaminates measured using the prism coupling method for both 633 nm and 1551 nm wavelengths are as low as 0.2 ± 0.1 dB/mm with the smallest crystal size. We also show that the third-order optical nonlinearity in ZnO/Al ₂O₃ nanolaminates can be enhanced by nanoscale engineering of the thin film structure.

Original language	English (US)
Title of host publication	Optical Components and Materials XI
Publisher	SPIE
ISBN (Print)	9780819498953
DOIs	https://doi.org/10.1117/12.2045006
State	Published - 2014
Event	Optical Components and Materials XI - San Francisco, CA, United States Duration: Feb 3 2014 → Feb 5 2014

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	8982
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Other

Other	Optical Components and Materials XI
Country/Territory	United States
City	San Francisco, CA
Period	2/3/14 → 2/5/14

Keywords

Atomic layer deposition
Loss
Third-order optical nonlinearity

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.2045006

Cite this

Karvonen, L., Alasaarela, T., Jussila, H., Mehravar, S., Chen, Y., Säynätjoki, A., Norwood, R. A., Peyghambarian, N., Kieu, K., Honkanen, S., & Lipsanen, H. (2014). Nanolaminate structures fabricated by ALD for reducing propagation losses and enhancing the third-order optical nonlinearities. In Optical Components and Materials XI Article 89820O (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8982). SPIE. https://doi.org/10.1117/12.2045006

Nanolaminate structures fabricated by ALD for reducing propagation losses and enhancing the third-order optical nonlinearities. / Karvonen, Lasse; Alasaarela, Tapani; Jussila, Henri et al.
Optical Components and Materials XI. SPIE, 2014. 89820O (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8982).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Karvonen, L, Alasaarela, T, Jussila, H, Mehravar, S, Chen, Y, Säynätjoki, A, Norwood, RA , Peyghambarian, N , Kieu, K, Honkanen, S & Lipsanen, H 2014, Nanolaminate structures fabricated by ALD for reducing propagation losses and enhancing the third-order optical nonlinearities. in Optical Components and Materials XI., 89820O, Proceedings of SPIE - The International Society for Optical Engineering, vol. 8982, SPIE, Optical Components and Materials XI, San Francisco, CA, United States, 2/3/14. https://doi.org/10.1117/12.2045006

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abstract = "We demonstrate a novel atomic layer deposition (ALD) process to make high quality nanocrystalline titanium dioxide (TiO2) and zinc oxide (ZnO) with intermediate Al2O3 layers to limit the crystal size. The waveguide losses of TiO2/Al2O3 nanolaminates measured using the prism coupling method for both 633 nm and 1551 nm wavelengths are as low as 0.2 ± 0.1 dB/mm with the smallest crystal size. We also show that the third-order optical nonlinearity in ZnO/Al 2O3 nanolaminates can be enhanced by nanoscale engineering of the thin film structure.",

keywords = "Atomic layer deposition, Loss, Third-order optical nonlinearity",

author = "Lasse Karvonen and Tapani Alasaarela and Henri Jussila and Soroush Mehravar and Ya Chen and Antti S{\"a}yn{\"a}tjoki and Norwood, {Robert A.} and Nasser Peyghambarian and Khanh Kieu and Seppo Honkanen and Harri Lipsanen",

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AU - Karvonen, Lasse

AU - Alasaarela, Tapani

AU - Jussila, Henri

AU - Mehravar, Soroush

AU - Chen, Ya

AU - Säynätjoki, Antti

AU - Norwood, Robert A.

AU - Peyghambarian, Nasser

AU - Kieu, Khanh

AU - Honkanen, Seppo

AU - Lipsanen, Harri

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N2 - We demonstrate a novel atomic layer deposition (ALD) process to make high quality nanocrystalline titanium dioxide (TiO2) and zinc oxide (ZnO) with intermediate Al2O3 layers to limit the crystal size. The waveguide losses of TiO2/Al2O3 nanolaminates measured using the prism coupling method for both 633 nm and 1551 nm wavelengths are as low as 0.2 ± 0.1 dB/mm with the smallest crystal size. We also show that the third-order optical nonlinearity in ZnO/Al 2O3 nanolaminates can be enhanced by nanoscale engineering of the thin film structure.

AB - We demonstrate a novel atomic layer deposition (ALD) process to make high quality nanocrystalline titanium dioxide (TiO2) and zinc oxide (ZnO) with intermediate Al2O3 layers to limit the crystal size. The waveguide losses of TiO2/Al2O3 nanolaminates measured using the prism coupling method for both 633 nm and 1551 nm wavelengths are as low as 0.2 ± 0.1 dB/mm with the smallest crystal size. We also show that the third-order optical nonlinearity in ZnO/Al 2O3 nanolaminates can be enhanced by nanoscale engineering of the thin film structure.

KW - Atomic layer deposition

KW - Loss

KW - Third-order optical nonlinearity

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Nanolaminate structures fabricated by ALD for reducing propagation losses and enhancing the third-order optical nonlinearities

Abstract

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Keywords

ASJC Scopus subject areas

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