Nanofabrication using near-field optical probes

Euan McLeod, Aydogan Ozcan

Research output: Contribution to journalReview articlepeer-review

8 Scopus citations

Abstract

Nanofabrication using near-field optical probes is an established technique for rapid prototyping and automated maskless fabrication of nanostructured devices. In this review, we present the primary types of near-field probes and their physical processing mechanisms. Highlights of recent developments include improved resolution by optimizing the probe shape, incorporation of surface plasmonics in probe design, broader use in biological and magnetic storage applications, and increased throughput using probe arrays as well as high-speed writing and patterning.

Original languageEnglish (US)
Pages (from-to)248-254
Number of pages7
JournalJournal of Laboratory Automation
Volume17
Issue number4
DOIs
StatePublished - Aug 2012
Externally publishedYes

Keywords

  • Lithography
  • NSOM
  • Nanofabrication
  • Near-field imaging
  • Near-field scanning optical microscopy
  • Scanning probe

ASJC Scopus subject areas

  • Computer Science Applications
  • Medical Laboratory Technology

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