Skip to main navigation Skip to search Skip to main content

Nano-g optomechanical accelerometry with a chip-scale torsion pendulum

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Measuring gravity with small test masses is a key program for both tabletop fundamental physics and commercial sensor technology. Here, we explore inertial sensing with a 10 Hz, 0.1 mg torsion pendulum with an ultralow damping rate of 10 µHz and a thermal acceleration sensitivity of ∼ 1 ng0/√Hz (g0 = 9.8 ms−2), formed by suspending a Si microchip from a high-stress (σ ≈ 1GPa) Si3N4 nanoribbon. Previous studies of this device focused on its operation as a semi-absolute clock gravimeter, demonstrating bias stabilities as low as 500ng0 at 1000s by frequency tracking. In this work, we operate it as spring-mass accelerometer read out with an optical lever. We demonstrate ∼ 100ng0/√Hz sensitivity between 0.1 and 100 Hz (as little as 40ng0/√Hz near resonance), limited by vibration isolation and thermal drift—sufficient to observe the ocean wave microseism from our laboratory in Tucson. We present progress towards improved sensitivity based on cross-spectral analysis with a commercial seismometer, measurement-based feedback cooling, and active vibration isolation. Longer term goals include measuring the Earth’s tides and integration with a source mass for short-range gravity measurements.

Original languageEnglish (US)
Title of host publicationQuantum Sensing, Imaging, and Precision Metrology IV
EditorsSelim M. Shahriar
PublisherSPIE
ISBN (Electronic)9781510697577
DOIs
StatePublished - Mar 5 2026
Event4th Quantum Sensing, Imaging, and Precision Metrology - San Francisco, United States
Duration: Jan 17 2026 → Jan 23 2026

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume13920
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

Conference4th Quantum Sensing, Imaging, and Precision Metrology
Country/TerritoryUnited States
CitySan Francisco
Period1/17/26 → 1/23/26

Keywords

  • accelerometer
  • gravimetry
  • MEMS
  • Precision measurement

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Fingerprint

Dive into the research topics of 'Nano-g optomechanical accelerometry with a chip-scale torsion pendulum'. Together they form a unique fingerprint.

Cite this