Abstract
A three-stage, multilayer ceramic microdischarge device, having an active length of ∼267 μm and a cylindrical discharge channel 140-150 μm in diameter, has been developed and operated continuously in Ne gas. Stable glow discharges are produced for pressures above 1 atm, operating voltages as low as 137 V (at 800 Torr), and specific power loadings of ∼40 kW cm-3. The V-I characteristics for a fired ceramic structure exhibit a negative resistance, whereas the resistance is positive prior to firing. The manufacturability of the fabrication process as well as the "flow-through" and multistage design of this device make it well suited for the excitation of gas microlasers or the dissociation of toxic or environmentally hazardous gases and vapors.
Original language | English (US) |
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Pages (from-to) | 1340-1342 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 78 |
Issue number | 10 |
DOIs | |
State | Published - Mar 5 2001 |
Externally published | Yes |
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)