Abstract
Multiple sample manipulator for a standard ultrahigh vacuum surface analysis chamber was discussed. The chamber holds four samples arranged in a carousel to make angle resolved spectroscopy measurements. Results showed that the manipulator reduces the number of pump down cycles necessary in the load lock for sample transfer.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 1036-1042 |
| Number of pages | 7 |
| Journal | Review of Scientific Instruments |
| Volume | 74 |
| Issue number | 2 |
| DOIs | |
| State | Published - Feb 2003 |
ASJC Scopus subject areas
- Instrumentation