Multilevel structures in sol-gel thin films with a single UV-exposure using a gray-scale mask

P. Äyräs; J. T. Rantala; R. Levy; M. R. Descour; S. Honkanen; N. Peyghambarian

doi:10.1016/S0040-6090(99)00404-6

Multilevel structures in sol-gel thin films with a single UV-exposure using a gray-scale mask

P. Äyräs, J. T. Rantala, R. Levy, M. R. Descour, S. Honkanen, N. Peyghambarian

Research output: Contribution to journal › Article › peer-review

26 Scopus citations

Abstract

Multilevel structures in sol-gel thin films with a single step process are demonstrated. A negative-tone hybrid sol-gel material is UV-exposed through a gray-scale calibration mask. Test strips of different depths and a continuous test profile are demonstrated. A maximum depth difference exceeding 1.5 μm is obtained, which permits the fabrication of multilevel diffractive elements for use in visible light. This method of using sol-gel material with a gray-scale mask has the potential for low-cost fabrication of complex multilevel micro-optical structures.

Original language	English (US)
Pages (from-to)	9-12
Number of pages	4
Journal	Thin Solid Films
Volume	352
Issue number	1-2
DOIs	https://doi.org/10.1016/S0040-6090(99)00404-6
State	Published - Sep 8 1999

Keywords

Glass
Sol-gel
Surface structure

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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10.1016/S0040-6090(99)00404-6

Cite this

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title = "Multilevel structures in sol-gel thin films with a single UV-exposure using a gray-scale mask",

abstract = "Multilevel structures in sol-gel thin films with a single step process are demonstrated. A negative-tone hybrid sol-gel material is UV-exposed through a gray-scale calibration mask. Test strips of different depths and a continuous test profile are demonstrated. A maximum depth difference exceeding 1.5 μm is obtained, which permits the fabrication of multilevel diffractive elements for use in visible light. This method of using sol-gel material with a gray-scale mask has the potential for low-cost fabrication of complex multilevel micro-optical structures.",

keywords = "Glass, Sol-gel, Surface structure",

author = "P. {\"A}yr{\"a}s and Rantala, \{J. T.\} and R. Levy and Descour, \{M. R.\} and S. Honkanen and N. Peyghambarian",

note = "Funding Information: We would like to acknowledge support from BMDO and COEDIP Center.",

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TY - JOUR

T1 - Multilevel structures in sol-gel thin films with a single UV-exposure using a gray-scale mask

AU - Äyräs, P.

AU - Rantala, J. T.

AU - Levy, R.

AU - Descour, M. R.

AU - Honkanen, S.

AU - Peyghambarian, N.

N1 - Funding Information: We would like to acknowledge support from BMDO and COEDIP Center.

PY - 1999/9/8

Y1 - 1999/9/8

N2 - Multilevel structures in sol-gel thin films with a single step process are demonstrated. A negative-tone hybrid sol-gel material is UV-exposed through a gray-scale calibration mask. Test strips of different depths and a continuous test profile are demonstrated. A maximum depth difference exceeding 1.5 μm is obtained, which permits the fabrication of multilevel diffractive elements for use in visible light. This method of using sol-gel material with a gray-scale mask has the potential for low-cost fabrication of complex multilevel micro-optical structures.

AB - Multilevel structures in sol-gel thin films with a single step process are demonstrated. A negative-tone hybrid sol-gel material is UV-exposed through a gray-scale calibration mask. Test strips of different depths and a continuous test profile are demonstrated. A maximum depth difference exceeding 1.5 μm is obtained, which permits the fabrication of multilevel diffractive elements for use in visible light. This method of using sol-gel material with a gray-scale mask has the potential for low-cost fabrication of complex multilevel micro-optical structures.

KW - Glass

KW - Sol-gel

KW - Surface structure

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DO - 10.1016/S0040-6090(99)00404-6

M3 - Article

AN - SCOPUS:0347031713

SN - 0040-6090

VL - 352

SP - 9

EP - 12

JO - Thin Solid Films

JF - Thin Solid Films

IS - 1-2

ER -

Multilevel structures in sol-gel thin films with a single UV-exposure using a gray-scale mask

Abstract

Keywords

ASJC Scopus subject areas

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