Multi-angle generalized ellipsometry of anisotropic optical structures

Neil A. Beaudry, Yanming Zhao, Russell Chipman

Research output: Contribution to journalConference articlepeer-review

2 Scopus citations


A new technique for simultaneous multi-angle ellipsometric measurements of anisotropic optical structures such as films used in the display industry is introduced. A very small area on the sample is illuminated with a focused beam which after it interacts with the sample and is polarization analyzed is spread across a CCD. Each pixed collects light from a different angle incident on the sample allowing data collection at numerous incident angles simultaneously. The small but significant polarization aberrations of the microscope objectives provide a significant challenge to accurate measurement A mathematical description of the ellipsometric technique is presented. The optical properties of two biaxial samples, a stretched plastic retarder element used for correcting angle of incident effects in LC displays, and a thin layer of E-type polarizing dried liquid crystal material are measured and maps of the ellipsometric parameters ψ and Δ as a function incident and azimuthal angles are presented. Data from both samples are reduced using an iterative algorithm with a biaxial thin film modeling software package to compute all three principle components of the dielectric tensor as well as it's orientation.

Original languageEnglish (US)
Article number588808
Pages (from-to)1-11
Number of pages11
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 2005
EventPolarization Science and Remote Sensing II - San Diego, CA, United States
Duration: Aug 2 2005Aug 4 2005


  • Anisotropic materials
  • Biaxial films
  • Birefringence
  • Dichroism
  • Dielectric tensor
  • Ellipsometry
  • Polarization

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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